TORUS®Circular & Linear Production
Magnetron Sputtering Cathodes
Our TORUS line of magnetron sputter sources for production applications are a major breakthrough in the field of high volume sputtering. These sputter sources feature a unique combination of exceptional target life, high sputter rates, and increased power densities unmatched in the industry. The patented magnet designs trap electrons in inner, center, and outer erosion zones with precise magnetic field shapes to allow for even erosion at maximum sputter target usage. With circular production sources available to 12" diameter and linear sources available in lengths up to 114", KJLC is positioned to offer the sputter solution for your production environment.
Features:
Maximum target utilization, up to 45% depending on source geometry
Operating voltage drops as low as 15% for deposition process stability
Patented magnet designs for magnetic or non-magnetic materials
Standard linear cathode sizes up to 11" W x 140" L
Standard circular cathode sizes up to 12" diameter
Versatile RF, DC or Pulsed-DC operation
Internal or flange-mount configurations
Customer specific designs available
Cathode retrofit and rebuild services available
Applications:
Automotive coatings
Architectural glass
Photovoltaic cells
Superconductors
Tool coatings
Wear coatings
Flat panel displays
Lighting
OLED/PLEDs
Medical coatings
Optical coatings
Utilization by Target Size
Our production cathodes optimize sputter target utilization for a wide range of target sizes, geometries, and maeterials. The values represented in the utilization table below were from using aluminum targets eroded at 9KW and 10-3 Torr using argon.
Target Size
(in.)
Utilization by wt.
(no backing plate)
kWhr
Volume Used
(in3)
Groove Depth
(in.)
Linear Cathode Production Sources
2 x 38 x 1/4
28%
181
5.1
0.183
3-1/2 x 30 x 3/8
40%
558
15.7
0.250
5 x 12 x 1/2
38%
371
12.0
0.450
5 x 12 x 5/8
33%
409
15.0
0.525
5 x 36 x 1/2
37%
975
36.0
0.461
6 x 15 x 5/8
41%
793
23.0
0.575
6 x 46 x 5/8
40%
2,170
69.0
0.583
8 x 36 x 7/8
44%
3,361
111.0
0.763
11 x 45 x 1
43%
5,869
173.0
0.810
Circular Cathode Production Sources
6 x 1/2
37%
146
5.5
0.450
7 x 5/8
41%
346
10.0
0.555
7 x 3/4
41%
410
11.8
0.620
8 x 3/4
38%
495
14.1
0.583
8 x 7/8
41%
719
18.0
0.726
8 x 1
42%
870
20.2
0.820
12 x 7/8
45%
1,576
44.5
0.790
Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.
