Electron Beam Evaporation Sources
We offer an integrated solution to electron beam (e-beam) evaporation applications. Our electron beam retrofit assemblies can be easily added to existing vacuum systems or designed into a new build. The customer has the ability to specify pocket size and number as well as power supply and control options.
Source Well Configurations (EBSW)
The electron beam source well (EBSW) is comprised of an electron beam evaporator mounted in a dedicated stainless steel "well". The electron beam source is mounted to a source drawer that provides easy and unrestricted access through a viton sealed door to the e-beam source for service and material replenishment. Source wells can be fitted with shielded viewing windows and can be modified to work in many different applications.
Flange-Mount Configurations (EBFM)
For more typical arrangements we offer a baseplate, or flange mounted electron beam assembly (EBFM). In this configuration the entire electron beam evaporator is conveniently located onto a single "flange mounted" unit.
EBSW & EBFM Options
- Shutters
- Cross contamination shielding
- Automatic crucible indexers
- Deposition monitors/controllers
Figure 1 (Electron Beam Source Well)
Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.