We offer an integrated solution to electron beam (e-beam) evaporation applications. Our electron beam retrofit assemblies can be easily added to existing vacuum systems or designed into a new build. The customer has the ability to specify pocket size and number, as well as power supply and control options.
- Cross-contamination shields
- Automatic crucible indexers
- Deposition monitors/controllers
- Custom mounting
Source Well Configurations (EBSW)
The Electron Beam Source Well (EBSW) is comprised of an electron beam evaporator mounted in a dedicated stainless steel "well." The electron beam source is mounted to a source drawer that provides easy and unrestricted access through a Viton® sealed door to the e-beam source for service and material replenishment. Source wells can be fitted with shielded viewing windows and can be modified to work in many different applications.
Flange-Mount Configurations (EBFM)
For more typical arrangements, we offer a baseplate, or Flange Mounted Electron Beam Assembly (EBFM). In this configuration, the entire electron beam evaporator is conveniently located on a single "flange mounted" unit. The flange can be customized to suit the mounting requirements.
Contact firstname.lastname@example.org to discuss your specific vacuum application and process equipment needs.