Technical Notes

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We offer an integrated solution to electron beam (e-beam) evaporation applications. Our electron beam retrofit assemblies can be easily added to existing vacuum systems or designed into a new build. The customer has the ability to specify pocket size and number, as well as power supply and control options.

• Shutters
• Cross-contamination shields
• Automatic crucible indexers
• Deposition monitors/controllers
• Custom mounting

Source Well Configurations (EBSW)

The Electron Beam Source Well (EBSW) is comprised of an electron beam evaporator mounted in a dedicated stainless steel "well." The electron beam source is mounted to a source drawer that provides easy and unrestricted access through a Viton^® sealed door to the e-beam source for service and material replenishment. Source wells can be fitted with shielded viewing windows and can be modified to work in many different applications.

EBSW Configuration with Drawer Closed	EBSW Configuration with Drawer Opened	EBSW Configuration Drawing

Flange-Mount Configurations (EBFM)

For more typical arrangements, we offer a baseplate, or Flange Mounted Electron Beam Assembly (EBFM). In this configuration, the entire electron beam evaporator is conveniently located on a single "flange mounted" unit. The flange can be customized to suit the mounting requirements.

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.