Deposition Sources >

Filamentless Ion Source Packages

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Our Ion Source systems include the ion source, power supply, cabling, feedthroughs, flexible internal utilities, swivel/rotating mounting collar, and choice of grids.

Our patented ion sources do not use thermionic tips nor filaments when generating plasma and neutralizing up to 85% of energy. These ion sources are offered in 3, 5, and 10 cm configurations.

Features:

3, 5, and 10 cm configurati
Filamentless sources
Reactive gas compatible
Internal or flange mount
Collimated or focused grids
UHV compatible

Applications include:

Ion-assisted deposition
Plasma cleaning
Oxiding
Nitriding
Surface modification

Specification Table

	3 cm Source	5 cm Source	10 cm Source
Filaments	none	none	none
Process Gas	Argon (standard)	Argon (standard) Oxygen (optional)	Argon (standard) Oxygen (optional)
Ion Beam Currents	2 mA at 25 eV to 7 mA at 1000 eV	2 mA at 25 eV to 35 mA at 1200 eV	2 mA at 25 eV to 67 mA at 1200 eV
Ion Optics	Molybdenum collimated optics (standard) Divergent, convergent, and graphite ion optics (optional)
Ion Beam Uniformity	± 10% in the inner 75% of beam diameter
Mounting	Remote Mount (standard) 8" min. CF Flange (optional)	Remote Mount (standard) 8" min. CF Flange (optional)	Remote Mount (standard) 10" min. CF Flange (optional)
Feedthrough	Dual 1" Gas and Electrical Feedthrough (standard) 2.75" CF Flanged Feedthrough (optional)
Source Material	300/400 Series Stainless Steel, High Purity, High Temperature Fired Ceramic
Required Gas Flow	7 to 15 sccm to sustain the plasma
Operational Pressure (based on 2000 L/s effective pumping speed for N₂)	1.2x10^-4 to 4x10^-4 Torr	9x10^-5 to 2x10^-4 Torr	9x10^-5 to 2x10^-4 Torr
Nominal Pump Speed	1000 liters/sec	2000 liters/sec	2000 liters/sec
Emitter Power Supply (constant current controlled)	100 V to 475 V @ 0 to 225 mA	100 V to 475 V @ 0 to 225 mA	100 V to 525 V @ 0 to 225 mA
Anode Power Supply (constant voltage controlled)	0 to 1000 V @ 2 to 7 mA	0 to 1000 V @ 2 to 35 mA	0 to 1000 V @ 2 to 67 mA
Accelerator Power Supply (constant voltage controlled)	0 to 100 V @ 1 to 2 mA
Dimensions:
Ion Source	3" dia. x 5.26" length	5.5" dia. x 7" length	6.1" dia. x 8.45" length
DC Switching Power Supply	19" rack mount (5.25" height x 18" depth)

NOTE:
Minimum ConFlat Flange Dimensions	Minimum ISO Flange Dimensions
3 cm gun — 6-3/4" flange with 5" diameter tube 5 cm gun — 8" flange with 6" diameter tube 10 cm gun — 10" flange with 8" diameter tube	3 cm gun — ISO 160 5 cm gun — ISO 200 10 cm gun — ISO 250

Standard Ion Configuration

Standard Ion Configuration
Select from the configuration options to create a part number and price for a particular ion source package. Example Configuration: I 3 L M A X R X 1

For additional product information and pricing contact our ion source specialists at ionsource@lesker.com or call us at 1.800.245.1656