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Deposition Sources

TORUS® Circular R & D Magnetron Sputtering Cathodes (HV)

TORUS Circular R&D Magnetron Sputtering Cathodes

We offer a comprehensive line of circular TORUS magnetron sputter sources suited for very high vacuum R&D applications. These sputter cathodes range in size from one to four inches in diameter, have exceptional target utilization, and can be driven by RF, DC or Pulsed-DC power supplies. Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.

TORUS R&D Sources are versatile:

  • RF, DC, and Pulsed-DC operation
  • Balanced or unbalanced operation of magnetic sputter targets
  • Axial, right angle, flex-head (±45°), and custom mounting configurations
  • Standard models accomodate sputter target sizes from 1" to 4"
  • Convertible target size kits available for most models

TORUS R&D Sources are engineered for optimum performance:

  • Wide pressure range operation to 10-9 Torr
  • Feature low outgassing
  • Excellent thin film uniformity and deposition rates
  • Efficient sputter target utilization
  • No special sputter target requirements (thermal pastes, keepers, etc. not required)
  • Compact, modular magnet array
  • Magnets NOT exposed to vacuum
  • Magnets NOT exposed to cooling water
  • Full line of accessories available (gas injection, chimneys, shutters, cluster arrays, etc.)
  • Custom sputter source configurations available

Figure 1 (Axial Head Design)

Axial Head Design

Figure 2 (Right Angle Head Design)

Right Angle Head Design

Figure 3 (Flex-Head Design)

Flex-Head Design

TORUS Dimensions & Available Options

All TORUS R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us for more information.

Model Figure Head Mount
Style 		Target Diam.
in. (mm) 		Target
Thickness
in. (mm) 		*Dimensions
in. (mm)		 Options & Accessories Available
A B C D E Deposition
Chimney 		Gas Injection
Ring 		Magnetic
Materials 		Convertible
Target Size
TM1 Fig 1
Axial 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 4.05
(103)		 4.28
(109)		 (n/a) 9.56
(243)		 18.48
(469)		 No No No No
TM1 Fig 2
Right Angle 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 4.05
(103)		 4.28
(109)		 (n/a) 9.56
(243)		 20.76
(527)		 No No No No
TM1 Fig 3
Flex 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 5.55
(141)		 5.78
(147)		 (n/a) 9.56
(243)		 (n/a) No No No No
TM2 Fig 1
Axial 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 4.08
(104)		 4.38
(111)		 0.11
(2.8)		 9.56
(243)		 18.58
(472)		 Yes Yes Yes No
TM2 Fig 2
Right Angle 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 4.08
(104)		 4.38
(111)		 0.11
(2.8)		 9.56
(243)		 20.88
(530)		 Yes Yes Yes No
TM2 Fig 3
Flex 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 5.58
(142)		 5.88
(149)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes No
TM3 Fig 1
Axial 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 3.41
(87)		 3.79
(96)		 0.11
(2.8)		 9.56
(243)		 18.11
(460)		 Yes Yes Yes Yes
TM3 Fig 2
Right Angle 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 3.41
(87)		 3.79
(96)		 0.11
(2.8)		 9.56
(243)		 20.41
(518)		 Yes Yes Yes Yes
TM3 Fig 3
Flex 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 4.91
(125)		 5.40
(137)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes Yes
TM4 Fig 1
Axial 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 3.66
(93)		 4.05
(103)		 0.11
(2.8)		 9.56
(243)		 18.37
(466)		 Yes Yes Yes Yes
TM4 Fig 2
Right Angle 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 3.66
(93)		 4.05
(103)		 0.11
(2.8)		 9.56
(243)		 20.67
(525)		 Yes Yes Yes Yes
TM4 Fig 3
Flex 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 5.16
(131)		 5.55
(141)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes Yes

* Note: Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.

TORUS Configuration & Pricing Matrix

Select from the configuration options below to create a part number and price for the particular TORUS sputter source required. Be sure to reference the table above for valid options for a given source size.

Example Configuration: TM2RS10EGP is a 2" OD right angle mount head on a 10" long tube with a standard magnet array mounted to an 8" CF flange with gas injection and pneumatic shaft-style shutter. Example configuration options selected shown in red below.

Style PartNo Prefix Base Price
TORUS Model/Size
For 1" OD Targets TM1 $2,195
For 2" OD Targets TM2 $2,595
For 3" OD Targets TM3 $2,995
For 4" OD Targets TM4 $3,995
Style Option PartNo Additional Price
Mounting Style
Axial A n/c
Right Angle R $165
Flex-Head F $615
Custom S Call
Magnet Array
Standard S n/c
Magnetic Materials M $195
Unbalanced Operation U Call
Tube Length*
10" 10 n/c
Flange Size
6" CF Flange (1.50" offset) 6 $350
6" CF Flange (on-center) F $350
8" CF Flange (1.50" offset) 8 $350
8" CF Flange (0.50" offset)
for flip or swing shutter options		 A $350
8" CF Flange (0.50" offset)
for pneumatic shaft-style shutter option 		E $350
10" CF Flange (on-center) B $350
(none) X n/c
Gas Injection
Gas Injection Ring G $185
Deposition Chimney C $215
Both Gas Injection Ring and Chimney B $400
(none) X n/c
Shutter
Manual Actuation Shaft-Style M $1,080
Pneumatic Acutation Shaft-Style P $1,580
Pneumatic Actuation Flip-Style F $1,360
Penumatic Actuation Swing-Style S $1,360
(none) X n/c

Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.