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Deposition Sources

TORUS® HV Circular

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KJLC offers a comprehensive line of circular TORUS magnetron sputter sources suited for most R & D applications. These sputter cathodes range in size from one to four inches in diameter, are functional with virtually any material, have exceptional target utilization, and can be driven by RF, DC, or Pulsed-DC power supplies.

Engineered for Optimum Performance:

Dimensional Drawings

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Click to view TM03AS10.jpg Click to view TM03RS10.jpg Click to view TM03FS10.jpg    
TM03AS10 TM03RS10 TM03FS10    


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TORUS Dimensions & Available Options

All TORUS R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us for more information.

Model Figure Head Mount Style Target Diam. in. (mm) Target Thickness in. (mm) *Dimensions in. (mm) Options & Accessories Available
A B C D E Deposition Chimney Gas Injection Ring Magnetic Materials Convertible Target Size
TM1 Fig 1
Axial 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 4.05
(103)		 4.28
(109)		 (n/a) 9.56
(243)		 18.48
(469)		 No No No No
TM1 Fig 2
Right Angle 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 4.05
(103)		 4.28
(109)		 (n/a) 9.56
(243)		 20.76
(527)		 No No No No
TM1 Fig 3
Flex 1.0 (25.4) 0.063 - 0.125
(1.6 - 3.2)		 5.55
(141)		 5.78
(147)		 (n/a) 9.56
(243)		 (n/a) No No No No
TM2 Fig 1
Axial 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 4.08
(104)		 4.38
(111)		 0.11
(2.8)		 9.56
(243)		 18.58
(472)		 Yes Yes Yes No
TM2 Fig 2
Right Angle 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 4.08
(104)		 4.38
(111)		 0.11
(2.8)		 9.56
(243)		 20.88
(530)		 Yes Yes Yes No
TM2 Fig 3
Flex 2.0 (50.8) 0.080 - 0.25
(2 - 6.3)		 5.58
(142)		 5.88
(149)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes No
TM3 Fig 1
Axial 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 3.41
(87)		 3.79
(96)		 0.11
(2.8)		 9.56
(243)		 18.11
(460)		 Yes Yes Yes Yes
TM3 Fig 2
Right Angle 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 3.41
(87)		 3.79
(96)		 0.11
(2.8)		 9.56
(243)		 20.41
(518)		 Yes Yes Yes Yes
TM3 Fig 3
Flex 3.0 (76) 0.080 - 0.25
(2 - 6.3)		 4.91
(125)		 5.40
(137)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes Yes
TM4 Fig 1
Axial 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 3.66
(93)		 4.05
(103)		 0.11
(2.8)		 9.56
(243)		 18.37
(466)		 Yes Yes Yes Yes
TM4 Fig 2
Right Angle 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 3.66
(93)		 4.05
(103)		 0.11
(2.8)		 9.56
(243)		 20.67
(525)		 Yes Yes Yes Yes
TM4 Fig 3
Flex 4.0 (102) 0.080 - 0.25
(2 - 6.3)		 5.16
(131)		 5.55
(141)		 0.11
(2.8)		 9.56
(243)		 (n/a) Yes Yes Yes Yes

* Note: Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch.
Add or subtract accordingly based on your particular sputter target size.


Start Your Configuration

Select from the configuration options below to create a part number and price for the particular TORUS sputter source required. Be sure to reference the table above for valid options for a given source size.
Example Configuration: TM2RS10EGP is a 2" OD right angle mount head on a 10" long tube with a standard magnet array mounted to an 8" CF flange with gas injection and pneumatic shaft-style shutter.

1. Target Diameter (target thickness):
2. Mounting Style:
3. Magnet Array:
4. Tube length:
5. Flange Size:
6. Gas Injection / Deposition Chimney:
7. Shutter:
Part Number:   

Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.