TORUS® Circular & Linear Production Magnetron Sputtering Cathodes
Our TORUS line of magnetron sputter sources for production applications are a major breakthrough in the field of high volume sputtering. These sputter sources feature a unique combination of exceptional target life, high sputter rates, and increased power densities unmatched in the industry. The patented magnet designs trap electrons in inner, center, and outer erosion zones with precise magnetic field shapes to allow for even erosion at maximum sputter target usage. With circular production sources available to 12" diameter and linear sources available in lengths up to 114", KJLC is positioned to offer the sputter solution for your production environment.
Features
- Maximum target utilization, up to 45% depending on source geometry
- Operating voltage drops as low as 15% for deposition process stability
- Patented magnet designs for magnetic or non-magnetic materials
- Standard linear cathode sizes up to 11" W x 140" L
- Standard circular cathode sizes up to 12" diameter
- Versatile RF, DC or Pulsed-DC operation
- Internal or flange-mount configurations
- Customer specific designs available
- Cathode retrofit and rebuild services available
Applications
- Automotive coatings
- Architectural glass
- Photovoltaic cells
- Superconductors
- Tool coatings
- Wear coatings
- Flat panel displays
- Lighting
- OLED/PLEDs
- Medical coatings
- Optical coatings
Utilization by Target Size
Our production cathodes optimize sputter target utilization for a wide range of target sizes, geometries, and maeterials. The values represented in the utilization table below were from using aluminum targets eroded at 9KW and 10-3 Torr using argon.
| Target Size (in.) |
Utilization by wt. (no backing plate) |
kWhr | Volume Used (in3) |
Groove Depth (in.) |
| Linear Cathode Production Sources | ||||
| 2 x 38 x 1/4 | 28% | 181 | 5.1 | 0.183 |
| 3-1/2 x 30 x 3/8 | 40% | 558 | 15.7 | 0.250 |
| 5 x 12 x 1/2 | 38% | 371 | 12.0 | 0.450 |
| 5 x 12 x 5/8 | 33% | 409 | 15.0 | 0.525 |
| 5 x 36 x 1/2 | 37% | 975 | 36.0 | 0.461 |
| 6 x 15 x 5/8 | 41% | 793 | 23.0 | 0.575 |
| 6 x 46 x 5/8 | 40% | 2,170 | 69.0 | 0.583 |
| 8 x 36 x 7/8 | 44% | 3,361 | 111.0 | 0.763 |
| 11 x 45 x 1 | 43% | 5,869 | 173.0 | 0.810 |
| Circular Cathode Production Sources | ||||
| 6 x 1/2 | 37% | 146 | 5.5 | 0.450 |
| 7 x 5/8 | 41% | 346 | 10.0 | 0.555 |
| 7 x 3/4 | 41% | 410 | 11.8 | 0.620 |
| 8 x 3/4 | 38% | 495 | 14.1 | 0.583 |
| 8 x 7/8 | 41% | 719 | 18.0 | 0.726 |
| 8 x 1 | 42% | 870 | 20.2 | 0.820 |
| 12 x 7/8 | 45% | 1,576 | 44.5 | 0.790 |
Contact our Process Equipment Division to discuss your specific vacuum application and process equipment needs.