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Deposition Sources > Thermal Evaporator Deposition Sources

Point Source Evaporator Deposition Sources for Organic Materials

Our low temperature evaporator (LTE) deposits volatile organic materials for thin film formation needed to produce organic light emitting devices (OLEDs), photovoltaic cells, and other organic material-based devices.

PID temperature control and uniform SCR-based power output using our M.A.P.S. power supplies enables precise deposition rate control and ensures a high-quality, uniform films.

Multiple sources may be arrayed in order to co-deposit dyed or doped films for color displays.

LTE Cluster Sources

LTE Cluster

We have the ability to configure a complete OLED source flange, including multiple (up to 9) LTE sources, metals evaporation, and quartz crystal deposition controllers. Each source can be adjusted vertically to vary the "throw" distance, and therefore, the flux density at the surface of the substrate. Please contact us for more information.

Features:

  • UHV compatible
  • "Plug-in" source design facilitates easy removal
  • Unique design for use with low temperature volatile organics
  • Ability to grow films with 5% uniformity on 150mm substrates at > 5 Å/sec.
  • Optimum plume configuration distributes material evenly across substrate
  • PID control (±0.1° C) for low temperature operation (50° C to 600° C)
  • Thermocouple in contact with crucible base for accurate temperature readings
  • Efficient heater coil for optimum heating profile
  • Easy to remove source cover for crucible exchange
  • Alumina crucibles reduce organic spitting while evenly distributing temperature
  • Integral flip shutter available

NOTE: The published dimensions will no longer include the shutter option.

Specifications Table

ModelLTE 01LTE 10LTE 30
Height3.49"5.09"5.59"
Diameter1.5" O.D.2.24" O.D.2.44" O.D.
Standard Crucible5cc Alumina15cc Alumina35cc Alumina
Charge Capacity1cc10cc30cc
Temperature Range50°C to 600°C50°C to 600°C50°C to 600°C

Typical LTE 10 Throw Rates(300mm Throw Distance)

AlQ3 50 Å/sec
PTCDA 0.2 to 2.0 Å/sec
CuPc 0.2 to 2.0 Å/sec
C60 0.2 to 2.0 Å/sec

Dimensional Drawings

Contact sales@lesker.com to discuss your specific vacuum application and process equipment needs.

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