Vacuum Gauges

MKS 627B Series Capacitance Manometers

MKS has improved on the industry standard Type 627A by incorporating new features into the Type 627B process capacitance manometer.

Features

• Temperature controlled to 45° C
• Accurate to 0.12% of reading
• Includes updated temperature control electronics to provide superior longterm stability and repeatability
• Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature at 45° C) is at temperature
• Available in full-scale ranges down to 20 mTorr to accommodate today's lower process pressures
• Interchangeable with MKS 127 and 627A capacitance manometers
• Can be used with MKS power supplies, display units, and pressure controllers or the user's compatible in-house power supply/readout device
• Inconel^® construction for excellent resistance to corrosive gases

Specifications Table

Measurement Method	Capacitance Manometer
Accuracy (% of measurement)	0.12% (1–1,000 Torr FS) 0.15% (0.1, 0.05 Torr FS) 0.25% (0.02 Torr FS)
Temperature (operating)	15-40° C
Max. Pressure	45 psia
Materials Exposed to Vacuum	Inconel
Analog Outputs	0-10 VDC
Internal Volume	6.3 cc
Input Power	±15 VDC ±5% @ 0.25A max.
Temperature Coeff. (zero)	0.002% (1-1,000 Torr FS) 0.005% (0.1 Torr) 0.015% (0.05 Torr) 0.03% (0.02 Torr)
Temperature Coeff. (span)	0.02% of reading/° C
Full-Scale Pressure	0.02, 0.05, 0.1, 1, 2, 10, 20, 100 & 1,000 Torr
Resolution	0.001% of F.S. (0.1 Torr or greater) 0.002% of F.S. (0.02, 0.05 Torr)

Product Configuration Ordering Table

Build your own gauge or controller below by choosing the base unit and options. A part number and price will automatically be generated for you to review and add to your shopping cart.

Note: Due to the custom nature of these products, they are no cancel / no return items.

Unit	Base Price
MKS 627B Capacitance Manometer	$1,560.00
Option	Additional Price
Full Scale Range       0.02 Torr   $312.00     0.05 Torr   $104.00     0.1 Torr   $0.00     1 Torr   $0.00     2 Torr   $0.00     10 Torr   $0.00     20 Torr   $0.00     100 Torr   $0.00     500 Torr   $0.00     1,000 Torr   $0.00 Fittings       1/2" Tube End   $0.00     8 VCR® Female   $68.00     1-1/3" CF (rotatable)   $68.00     KF16   $68.00     8 VCR® Female   $68.00     2-3/4" CF (rotatable)   $68.00     KF25   $68.00 Accuracy       Standard: 0.12% of Reading (1-1,000 Torr only)   $0.00     Standard: 0.15% of Reading (0.05, 0.1 Torr only)   $0.00     Standard: 0.25% of Reading (0.02 Torr)   $0.00 Readout Options       Standard Display   $0.00     Optional Heater/Temp. Status Display   $99.00 Connector       15-pin Type D with Thread Lock   $0.00     15-pin Type D with Slide Lock   $0.00

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

Accessory Type	Description	PartNo	Price (USA)	Add To Cart
Interconnect Cable	From 627 manometer to PDR2000 (3m)	MCB2000S1M1	$104.00
Interconnect Cable	From 627 manometer to 250, 244 (3m)	MCB258110	$57.00
Interconnect Cable	From 627 manometer to PR4000, 146, 186, 651, 660 (3m)	MCB259510	$57.00

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]