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MKS 627B Series Capacitance Manometers

MKS has improved on the industry standard Type 627A by incorporating new features into the Type 627B process capacitance manometer.

Temperature controlled to 45° C
Accurate to 0.12% of reading
Includes updated temperature control electronics to provide superior longterm stability and repeatability
Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature at 45° C) is at temperature
Available in full-scale ranges down to 20 mTorr to accommodate today's lower process pressures
Interchangeable with MKS 127 and 627A capacitance manometers
Can be used with MKS power supplies, display units, and pressure controllers or the user's compatible in-house power supply/readout device
Inconel^® construction for excellent resistance to corrosive gases

Measurement Method	Capacitance Manometer
Accuracy (% of measurement)	0.12% (1–1,000 Torr FS) 0.15% (0.1, 0.05 Torr FS) 0.25% (0.02 Torr FS)
Temperature (operating)	15-40° C
Max. Pressure	45 psia
Materials Exposed to Vacuum	Inconel
Analog Outputs	0-10 VDC
Internal Volume	6.3 cc
Input Power	±15 VDC ±5% @ 0.25A max.
Temperature Coeff. (zero)	0.002% (1-1,000 Torr FS) 0.005% (0.1 Torr) 0.015% (0.05 Torr) 0.03% (0.02 Torr)
Temperature Coeff. (span)	0.02% of reading/° C
Full-Scale Pressure	0.02, 0.05, 0.1, 1, 2, 10, 20, 100 & 1,000 Torr
Resolution	0.001% of F.S. (0.1 Torr or greater) 0.002% of F.S. (0.02, 0.05 Torr)

Start Your Configuration

Tips for Capacitance Manometer operation:

Avoid over pressurizing the gauge
Maintain a stable ambient temperature
Avoid vibration
Avoid particulate contamination, or any contamination that may affect diaphragm motion
Recalibrate frequently

1. Unit:
* 2. Full Scale Range:
3. Fittings:
4. Accuracy:
5. Readout Options:
6. Connector:
* The Full Scale Range value is the maximum pressure for which the particular capacitance manometer has been calibrated. The sensor will measure from this pressure to four decades below this pressure. Example: A capacitance manometer with a Full Scale Range of 10 Torr will accurately display pressures from 10 Torr to 0.001 Torr.
Part Number:

For more in depth information please reference our Technical Notes on gauging, read our Lesker Tech back issues concerning gauging, or email us at Gauging@Lesker.com.

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