A new, economical single-channel controller that is ideal for applications in the rough to high vacuum range of 100 down to 10-4 Torr (133 to 10-4 mbar) including vacuum pump base pressure measurement and system process startup using the two standard set points.
Features
Rugged filament design for reliable operation
Designed for harsh process environments
Rapid response to pump down and vent operations
Repeatable measurements and independent relay set points for optimum process control
Digital LED display
CE marked
Applications
Semiconductor
Load locks
Leak detection
Vacuum coating
Freeze dryers
Specifications Table
Measurement Method
Pirani
Measurement Range
1.0 x 10-4 Torr (1.3 x 10-4 mbar) to Atmosphere: 5% of reading Tconst