Deposition Sources:
Thermal Evaporation Sources >>
TORUS® Magnetron Sputtering Cathodes >>
Electron Beam Evaporation Sources >>
RF Inductive Evaporation Sources >>
Ion Sources >>
Power Supplies >>
We made our first commercial, patented, TORUS® Magnetron Sputter Source in the early 1980s.
Since then, our aggressive, on-going R&D efforts have led us into other areas of deposition source development, including: thermal evaporators for both inorganic and organic materials, electron-beam evaporators in flange-mount and service well configurations, ion beam sources for assisted deposition, RF inductive evaporators for aluminum, and numerous other sources for deposition. And today, more than ever, we remain a leading manufacturer of circular & linear sputtering cathodes for R&D and production applications under our own TORUS brand.
To discuss our latest advances in deposition source technology or for application questions please contact our Process Equipment Division .