The Kurt J. Lesker Company’s Process Equipment Division is a leader in producing vacuum systems. From single-chamber deposition systems to cluster tools with robotic transfer, KJLC’s PED is equipped to help you design and build a vacuum system to suit your custom needs. We offer total engineering solutions including; process, applications, mechanical, electrical and software. To date we have supplied over 1,600 systems to nearly 900 customers worldwide. Along with our several platforms of vacuum systems we also offer support items such as, power supplies, crystal sensors, mass flow controllers, and more under or process equipment heading. We offer a complete line of evaporators and sources including our Torus® Magnatron Sputtering Cathodes, thermal evaporators for both inorganic and organic materials, electron-beam evaporators in flange-mount and service well configurations, ion beam sources for assisted deposition, RF inductive evaporators for aluminum, and numerous other sources for deposition. Our Process Equipment Division also offers several system components for your own builds, such as heating and bakeout equipment , load lock doors, and transfer mechanisms. The Process Equipment Division’s global service department consists of dedicated, experienced personnel that strive to provide world class customer service on any tool you purchase.
Vacuum Systems |
Deposition Sources |
|
We manufactured our first thin-film vacuum deposition system over 20 years ago at our U.S. headquarters in Pittsburgh, Pa. Hundreds of systems later our proven Process Equipment Division, with engineering, manufacturing, and clean-room assembly areas in the U.S. and U.K., design and manufacture PVD and CVD deposition systems to suit your process application needs.
|
We made our first commercial, patented, TORUS® Magnetron Sputter Source in the early 1980s. Since then, our aggressive, on-going R&D efforts have led us into other areas of deposition source development, including: thermal evaporators for both inorganic and organic materials, electron-beam evaporators in flange-mount and service well configurations, ion beam sources for assisted deposition, RF inductive evaporators for aluminum, and numerous other sources for deposition. And today, more than ever, we remain a leading manufacturer of circular & linear sputtering cathodes for R&D and production applications under our own TORUS brand.
|
|
Process Equipment |
System Components |
|
Process Equipment tends to be a 'catch-all' category. We include equipment that measures, records, and controls vacuum processes. We offer Crystal Monitors to measure deposition rate and film thickness; Mass Flow Meters and Controllers for a variety of gasses and condensable vapors; and Power Supplies used for thin film processes including sputtering, plasma etching, and thermal evaporation.
|
In the beginning of this section we offer complete sub-assembly packages that consist of a chamber, frame (hoist where applicable), both high vacuum and backing pump, gauging, valves, and load lock assemblies. The technical notes below focus on the individual components offered in the remainder of this section that are not included elsewhere in the catalog. These include both bakeout and sample heaters, load locks, and chamber frames.
|
|
News
Follow Us
Copyright ©1996-2012 Kurt J. Lesker Company® All rights reserved