KJLC R-Series RF Power Supplies
Our new R-Series RF power supplies are second-generation, 13.56 MHz power generators available in configurations from 300W up to 3kW. Our R-Series power supplies are ideal for magnetron sputtering and plasma etching applications.
These compact, air-cooled RF power supplies are designed to exceed the most stringent vacuum processing demands. They can be used as the sole source for plasma generation or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four-line fluorescent display. Our “R-Series” products incorporate a single surface-mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a switch mode power supply. Our “R-Series” products use Field-Effect Transistors in the exciter and power amplifier stages. These units operate in class AB mode, providing power accuracy and stability across the entire power range.
Features
- Microprocessor-controlled, solid-state construction
- Master and slave mode operations
- Automatic and manual matching networks available
- Various control modes regulate power output (DC & RF voltage and Forward & Load power leveling)
- Electronics constructed to minimize VSWR conditions, extending unit life
- Programmable high-speed pulsing
- Complete power generator packages available—includes everything you need, eliminating guesswork
- CE marked compliance
- 15-month fully backed warranty for peace of mind
| R301 | R601 | R1001 | R2001 | R3001 | |
| Power Output (high range) |
0-300 W | 0–600 W | 0–1,000 W | 0–2,000 W | 0–3,000 W |
| Output Impedance | 50 Ohms, ± 5 Ohms Nominal | ||||
| Frequency | 13.56 MHz (Fixed) | ||||
| Metering Accuracy (Forward Power) |
± 1% Full Scale; ± 3% of Reading |
± 1% Full Scale; ± 1% of Reading |
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| Output Power Stability | ± 0.5% Long Term | ± 0.5% Long Term; ± 1 Watt | |||
| Harmonics | -50 dBc | -50 dBc | -50 dBc | -50 dBc | -50 dBc |
| Input Power | 90-125V or 190-264V, 1 Phase 47-63 Hz (Factory Configured) |
190–264V, 1 Phase 47–63 Hz (Factory Configured) |
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| Output Connector | Type "N" Female | Type “N” Female | Type “N” Female | Type “HN” Female | Type “HN” Female |
| Interface Connectors | Serial: DB-9 Female; Analog: DB-25 Female; CEX: Female BNC | ||||
| Pulsing | 0-1KHz, 1-Hz Steps, 50 micro-sec Minimum Pulse | ||||
| Cooling | Forced Air 110 CFM |
Forced Air 110 CFM |
Forced Air 110 CFM |
Forced Air: 150 CFM Cooling Water: 2 GPM |
Forced Air: 150 CFM Cooling Water: 3 GPM |
| Dimensions (in.) (H x W x D) |
5.25 x 9.50 x 18.35 W = 8.00" w/o Rack |
7.00 x 9.50 x 18.38 W = 8.00" w/o Rack |
7.00 x 9.50 x 18.38 W = 8.00" w/o Rack |
7.00 x 19.00 x 22.75 W = 17.00" w/o Rack |
7.00 x 19.00 x 22.75 W = 17.00" w/o Rack |
| Weight | 43 lbs. (19.5 kg) | 37 lbs. (16.8 kg) | 37 lbs. (16.8 kg) | 55 lbs. (24.9 kg) | 70 lbs. (31.4 kg) |
R-Series Power Supplies
Prices below are for the bare power supply only. Mounting, interconnect cabling, and matching network [tuner] sold separately.
| Description | Part No. | Price (USA) |
Add To Cart |
|---|---|---|---|
Complete R-Series Power Supply Packages
Our packages listed below are complete RF sputtering solutions. They contain the appropriate power supply, interconnect cables, matching network [tuner], controller (where applicable), and rackmount kit.
| Description | Part No. | Price (USA) |
Add To Cart |
|---|---|---|---|
Contact our Process Equipment Division for more information and to discuss your specific process application requirements.