Process Equipment > RF Power Supplies

KJLC R-Series

Photo-ID-R301.jpg

Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.

CE marked compliance
Microprocessor-controlled, solid-state construction
Master and slave mode operations
Automatic and manual matching networks available
Electronics constructed to minimize VSWR conditions, extending unit life
Programmable high-speed pulsing
Complete power generator packages — includes everything you need, eliminating guesswork

NOTE: 1kW - 10kW power supply packages come with no output connector. Additional charges may be applied for certain output options.

Model	R301	R601
Power Output	High Range: 0–300 Watts	High Range: 0–600 Watts
Input Power	90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured)	90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured)
Frequency	13.56 MHz, (Fixed)	13.56 MHz, (Fixed)
Weight	43 lbs. (19.5 kg)	37 lbs. (16.8 kg)
Dimensions	5.25" H x 9.50" W x 18.35" D W = 8.00" (w/o Rackmount Kit)	7.00" H x 9.50" W x 18.38" D W = 8.00" (w/o Rackmount Kit)
Output Impedance	50 Ohms, ± 5 Ohms Nominal	50 Ohms, ± 5 Ohms Nominal
Interface Connector	Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC	Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC
Cooling	Forced Air, 110 CFM	Forced Air, 110 CFM
Metering Accuracy	± 1% Full Scale ± 3% of Reading	± 1% Full Scale ± 3% of Reading
Output Power Stability	± 0.5% Long Term	± 0.5% Long Term ± 1Watt
Harmonics	-50 dBc	-50 dBc
Pulsing	0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse	0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse

Individual or Package	Description	PartNo	Price
R-Series Power Supplies	R1001 1kW Power Supply (220 VAC)	EJR1001-220	$9,780.00
R-Series Power Supplies	R2001 2kW Power Supply (220 VAC)	EJR2001-220	P.O.R.
R-Series Power Supplies	R3001 3kW Power Supply (220 VAC)	EJR3001-220	P.O.R.
R-Series Power Supplies	R301 300W Power Supply (220 VAC)	EJR301-220	$4,375.00
R-Series Power Supplies	R601 600W Power Supply (220 VAC)	EJR601-220	$6,250.00

Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]

Type	Description	PartNo	Price
Complete R-Series Power Supply Packages	R301 300W Power Supply Package (120 VAC), Auto-Match	RF03A12XX300	$9,336.00
Complete R-Series Power Supply Packages	R301 300W Power Supply Package (220 VAC), Auto-Match	RF03A22XX300	$9,336.00
Complete R-Series Power Supply Packages	R601 600W Power Supply Package (220 VAC), Auto-Match	RF06A22XX300	$12,986.00
Complete R-Series Power Supply Packages	R1001 1kW Power Supply Package (220 VAC), Auto-Match *	RF10A22XX300	$20,218.00
Complete R-Series Power Supply Packages	R2001 2kW Power Supply Package (220 VAC), Auto-Match *	RF20A22XX300	$26,540.00
Complete R-Series Power Supply Packages	R3001 3kW Power Supply Package (220 VAC), Auto-Match *	RF30A22XX300	$27,800.00

Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]

Contact sales@lesker.com for more information, including pricing and options, and to discuss your specific process application requirements.


Buy Online or Call 800.245.1656		Cart