-
- PDF Downloads:
-
Product Section from Catalog
- Questions?
-
Email to USA
-
Email to Canada
-
Email to Europe
-
Email to China
-
Email to Rest of World
KJLC R-Series
(Click image to view in a new window) |
Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.
Features:
- CE marked compliance
- Microprocessor-controlled, solid-state construction
- Master and slave mode operations
- Automatic and manual matching networks available
- Electronics constructed to minimize VSWR conditions, extending unit life
- Programmable high-speed pulsing
- Complete power generator packages — includes everything you need, eliminating guesswork
Control modes to regulate power output:
- DC Voltage
- RF Voltage
- Forward Power Leveling
- Load Power Leveling
Specifications Table
| Model | R301 | R601 |
| Power Output | High Range: 0–300 Watts | High Range: 0–600 Watts |
| Output Impedance | 50 Ohms, ± 5 Ohms Nominal |
50 Ohms, ± 5 Ohms Nominal |
| Frequency | 13.56 MHz, (Fixed) | 13.56 MHz, (Fixed) |
| Metering Accuracy (Forward Power) |
± 1% Full Scale ± 3% of Reading |
± 1% Full Scale ± 1% of Reading |
| Output Power Stability |
± 0.5% Long Term | ± 0.5% Long Term ± 1Watt |
| Harmonics | -50 dBc | -50 dBc |
| Input Power | 90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured) |
90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured) |
| Output Connector | Type "N" Female | Type "N" Female |
| Interface Connectors |
Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC |
Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC |
| Pulsing | 0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse |
0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse |
| Cooling | Forced Air, 110 CFM | Forced Air, 110 CFM |
| Dimensions | 5.25" H x 9.50" W x 18.35" D W = 8.00" (w/o Rackmount Kit) |
7.00" H x 9.50" W x 18.38" D W = 8.00" (w/o Rackmount Kit) |
| Weight | 43 lbs. (19.5 kg) | 37 lbs. (16.8 kg) |
Ordering Table
| Individual or Package |
Description | PartNo |
|---|---|---|
Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
Accessories Table
| Type | Description | PartNo |
|---|---|---|
Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
* Contact PED@lesker.com for output connection options. 1kW - 10kW power supply packages come with no output connector. Additional charges may be applied for certain output options.
