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KJLC R-Series RF Power Supplies

R301.jpg

Our new R-Series RF power supplies are second-generation, 13.56 MHz power generators available in configurations from 300W up to 3kW. Our R-Series power supplies are ideal for magnetron sputtering and plasma etching applications.

These compact, air-cooled RF power supplies are designed to exceed the most stringent vacuum processing demands. They can be used as the sole source for plasma generation or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four-line fluorescent display. Our “R-Series” products incorporate a single surface-mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a switch mode power supply. Our “R-Series” products use Field-Effect Transistors in the exciter and power amplifier stages. These units operate in class AB mode, providing power accuracy and stability across the entire power range.

Features

  • Microprocessor-controlled, solid-state construction
  • Master and slave mode operations
  • Automatic and manual matching networks available
  • Various control modes regulate power output (DC & RF voltage and Forward & Load power leveling)
  • Electronics constructed to minimize VSWR conditions, extending unit life
  • Programmable high-speed pulsing
  • Complete power generator packages available—includes everything you need, eliminating guesswork
  • CE marked compliance
  • 15-month fully backed warranty for peace of mind
  R301 R601 R1001 R2001 R3001
Power Output
(high range)
0-300 W 0–600 W 0–1,000 W 0–2,000 W 0–3,000 W
Output Impedance 50 Ohms, ± 5 Ohms Nominal
Frequency13.56 MHz (Fixed)
Metering Accuracy
(Forward Power)
± 1% Full Scale;
± 3% of Reading
± 1% Full Scale;
± 1% of Reading
Output Power Stability ± 0.5% Long Term ± 0.5% Long Term; ± 1 Watt
Harmonics -50 dBc -50 dBc -50 dBc -50 dBc -50 dBc
Input Power 90-125V or 190-264V, 1 Phase
47-63 Hz (Factory Configured)
190–264V, 1 Phase
47–63 Hz (Factory Configured)
Output Connector Type "N" Female Type “N” Female Type “N” Female Type “HN” Female Type “HN” Female
Interface Connectors Serial: DB-9 Female; Analog: DB-25 Female; CEX: Female BNC
Pulsing 0-1KHz, 1-Hz Steps, 50 micro-sec Minimum Pulse
Cooling Forced Air
110 CFM
Forced Air
110 CFM
Forced Air
110 CFM
Forced Air: 150 CFM
Cooling Water: 2 GPM
Forced Air: 150 CFM
Cooling Water: 3 GPM
Dimensions (in.)
(H x W x D)
5.25 x 9.50 x 18.35
W = 8.00" w/o Rack
7.00 x 9.50 x 18.38
W = 8.00" w/o Rack
7.00 x 9.50 x 18.38
W = 8.00" w/o Rack
7.00 x 19.00 x 22.75
W = 17.00" w/o Rack
7.00 x 19.00 x 22.75
W = 17.00" w/o Rack
Weight 43 lbs. (19.5 kg) 37 lbs. (16.8 kg) 37 lbs. (16.8 kg) 55 lbs. (24.9 kg) 70 lbs. (31.4 kg)

R-Series Power Supplies

Prices below are for the bare power supply only. Mounting, interconnect cabling, and matching network [tuner] sold separately.

Description Part No. Price
(USA)
Add To Cart
R301 300W Power Supply (220 VAC) EJR301-220 $4,250.00
R601 600W Power Supply (220 VAC) EJR601-220 $6,250.00
R1001 1kW Power Supply (220 VAC) EJR1001-220 P.O.R.
R2001 2kW Power Supply (220 VAC) EJR2001-220 P.O.R.
R3001 3kW Power Supply (220 VAC) EJR3001-220 P.O.R.

Complete R-Series Power Supply Packages

Our packages listed below are complete RF sputtering solutions. They contain the appropriate power supply, interconnect cables, matching network [tuner], controller (where applicable), and rackmount kit.

Description Part No. Price
(USA)
Add To Cart
R301 300W Power Supply Package (120 VAC), Manual-Match RF03M12XX300 $6,073.35
R301 300W Power Supply Package (220 VAC), Manual-Match RF03M22XX300 $6,073.35
R301 300W Power Supply Package (120 VAC), Auto-Match RF03A12XX300 $8,868.25
R301 300W Power Supply Package (220 VAC), Auto-Match RF03A22XX300 $9,336.00
R601 600W Power Supply Package (220 VAC), Auto-Match RF06A22XX300 $12,336.70
R1001 1kW Power Supply Package (220 VAC), Auto-Match RF10A22XX300 $19,207.10
R2001 2kW Power Supply Package (220 VAC), Auto-Match RF20A22XX300 $21,895.60
R3001 3kW Power Supply Package (220 VAC), Auto-Match RF30A22XX300 $23,605.60

Contact our Process Equipment Division for more information and to discuss your specific process application requirements.