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Substrate Quartz Lamp Heaters
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Act as both bakeout heaters and sample heaters.
Features
- Mount inside a vacuum chamber to raise the temperature of substrates
- Because they produce infrared radiation and ultraviolet light, they clean nearly all molecules adhering to the substrate’s surface through electron excitation and molecular vibration
- Unit can operate safely in an oxygen backfill
- Can be used in place of blanket heaters or panel ovens
- Save time and power—heat radiates directly to the critical surfaces
- Heater can achieve temperature uniformity of better than ±10% across a 4" diameter substrate
- Black box design ensures efficient heat containment, minimizing secondary heating of other components
We offer single lamp assemblies, approximately 4" in length. Each uses a 500W lamp, producing 9,500 lumens. Lamps are mounted in an electropolished stainless steel "V" reflector with a high-temperature, fabric-covered power cable. Our lamps have a heat output of approximately 200° C with an average life of 2,000 hours. Arrays of multiple lamps are also available in triangular and other configurations.
A more complete explanation of vacuum heating go to http://www.lesker.com/leskertech/subscribe.cfm, sign up, and download Volume 2 Issue 4 "Hot, Hot, Hot" of Lesker Tech. For tips on estimating and possibly raising substrate temperatures in specific installations write to techinfo@lesker.com.
NOTE:
- * Calculated using: Planck's law of black body radiation
- ** Calculated using: Blackbody Radiation Applet
Dimensional Drawings
| Click on a thumbnail image to open the drawing in a new window. | ||||
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| QLH0500 | QLH-ARRAY2 | QLH-ARRAY3 | QLH-ARRAY4 | |
Ordering Table
| Description | Total Power (Watts) |
Number of Lamps |
PartNo |
|---|---|---|---|
Accessories Table
| Description | PartNo |
|---|---|








