Planar Load Lock Assemblies
Kurt J. Lesker Company pre-engineered load lock system kits include our Planer Series quick-entry load lock vessel, available in 10"CF or 8"CF interface flanges. System kits include a manual or pneumatic isolation valve, rack-and-pinion transfer device, transfer forks and hardware pack.
Vacuum pumping includes a turbo molecular pumping with dry roughing pump connected via a stainless steel bellows. A wide-range vacuum gauge is read through the turbo controller.
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* Vessel I.D. does not include gate valve.