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System Sub-Assemblies & Components > Load Locks

Cylindrical Series Load Lock Vessels

Click to view Photo-SA-LLC_5501.jpg
Photo-SA-LLC_5501.jpg

Available in stainless steel or aluminum.

Features

* For accessory products, please click.

Dimensional Drawings

LLC-CYLD3S
LLC-CYLD3S

Drawing: LLC-CYLD3S

Ordering Table

Type Actual
Wafer Size		 Reference
Wafer Size		 Mounting
Flange		 Vessel I.D.* Pumping Port Linear Motion
Translator Port		 Utility Ports PartNo Price Add To Cart
Aluminum Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3A $2,040.00
Stainless Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3S P.O.R.

* Vessel I.D. does not include gate valve.

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