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System Sub-Assemblies & Components > Load Locks

Cylindrical Series Load Lock Vessels

Click to view Photo-SA-LLC_5501.jpg
Photo-SA-LLC_5501.jpg

Available in stainless steel or aluminum.

Features

* For accessory products, please click.

Dimensional Drawings

LLC-CYLD3S
LLC-CYLD3S

Drawing: LLC-CYLD3S


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Ordering Table

Type Actual
Wafer Size		 Reference
Wafer Size		 Mounting
Flange		 Vessel I.D.* Pumping Port Linear Motion
Translator Port		 Utility Ports PartNo Price Add To Cart
Aluminum Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3A $2,040.00
Stainless Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3S P.O.R.

E-mail KJLC Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

LL Door
Flange
Size		 LL Door
Door
Opening		 LL Door
Viewport
Diameter		 LL Door
Thickness		 PartNo Price Add To Cart
4-1/2" CF
2.51"
N/A
1.42"
 DS-LL0450 $750.00
4-1/2" CF
2.51"
2.50"
1.42"
 DS-LL0450VP $860.00
6" CF
4.01"
N/A
1.54"
 DS-LL0600 $795.00
6" CF
4.01"
4.00"
1.54"
 DS-LL0600VP $895.00
8" CF
6.02"
N/A
1.54"
 DS-LL0800 $895.00
8" CF
6.02"
6.00"
1.54"
 DS-LL0800VP $1,095.00
10" CF
8.02"
N/A
1.84"
 DS-LL1000 $1,095.00
10" CF
8.02"
6.00"
1.84"
 DS-LL1000VP $1,295.00
12" CF
10.02"
N/A
1.92"
 DS-LL1200 $2,395.00
12" CF
10.02"
6.00"
1.92"
 DS-LL1200VP $2,595.00
13-1/4" CF
10.02"
N/A
1.97"
 DS-LL1325 $2,595.00
13-1/4" CF
10.02"
6.00"
1.97"
 DS-LL1325VP $2,795.00
14" CF
11.47"
N/A
1.97"
 DS-LL1400 $2,980.00
14" CF
11.47"
6.00"
1.97"
 DS-LL1400VP $3,520.00

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* Vessel I.D. does not include gate valve.