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System Sub-Assemblies & Components  > 

Cylindrical Series Load Lock Vessels

 

Available in stainless steel or aluminum.

Features

* For accessory products, please click.

Dimensional Drawings

Click on a thumbnail image to open the drawing in a new window.
Click to view Dwg_LLC-CYLD3S.jpg        
LLC-CYLD3S        

Ordering Table

International Pricing iconPlease select your region to display prices and enable on-line shopping:
Type Actual
Wafer Size		 Reference
Wafer Size		 Mounting
Flange		 Vessel I.D.* Pumping Port Linear Motion
Translator Port		 Utility Ports PartNo
Aluminum Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3A
Stainless Cylindrical LL Series
76.2 mm
3"
6" CF
3.50" x 1.50"
ISO63-K
4-1/2" CF
KF25
 LLC-CYLD3S

E-mail KJLC Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

LL Door
Flange
Size		 LL Door
Door
Opening		 LL Door
Viewport
Diameter		 LL Door
Thickness		 PartNo
8" CF
6.02"
6.00"
1.54"
 DS-LL00800VP
4-1/2" CF
2.51"
N/A
1.42"
 DS-LL0450
4-1/2" CF
2.51"
2.50"
1.42"
 DS-LL0450VP
6" CF
4.01"
N/A
1.54"
 DS-LL0600
6" CF
4.01"
4.00"
1.54"
 DS-LL0600VP
8" CF
6.02"
N/A
1.54"
 DS-LL0800
10" CF
8.02"
N/A
1.84"
 DS-LL1000
10" CF
8.02"
6.00"
1.84"
 DS-LL1000VP
12" CF
10.02"
N/A
1.92"
 DS-LL1200
12" CF
10.02"
6.00"
1.92"
 DS-LL1200VP
13-1/4" CF
10.02"
N/A
1.97"
 DS-LL1325
13-1/4" CF
10.02"
6.00"
1.97"
 DS-LL1325VP
14" CF
11.47"
N/A
1.97"
 DS-LL1400
14" CF
11.47"
6.00"
1.97"
 DS-LL1400VP

E-mail KJLC Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

* Vessel I.D. does not include gate valve.