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System Sub-Assemblies & Components > Load Locks

Utility Series Load Lock Vessels

Economical, entry-level design.

Features

* For accessory products, please click.

Dimensional Drawings

LLC-UTILX
LLC-UTILX

Drawing: LLC-UTILX

Ordering Table

Type Actual
Wafer Size		 Reference
Wafer Size		 Mounting
Flange		 Mounting
Flange B		 Vessel I.D.* Pumping Port Linear Motion
Translator Port		 Utility Ports PartNo Price Add To Cart
Utility LL Series
76.2 mm
3"
6" CF
10.12
3.75" Diameter
ISO63-K
4-1/2" CF
KF25, KF16
 LLC-UTIL3 $2,655.00
Utility LL Series
100 mm
4"
8" CF
15.30
5.75" Diameter
ISO63-K
4-1/2" CF
KF25, KF16
 LLC-UTIL4 $3,190.00
Utility LL Series
150 mm
6"
10" CF
15.30
7.75" Diameter
ISO63-K
4-1/2" CF
KF25, KF16
 LLC-UTIL6 $3,845.00

Accessories Table

LL Door
Flange
Size		 LL Door
Door
Opening		 LL Door
Viewport
Diameter		 LL Door
Thickness		 PartNo Price Add To Cart
6" CF
4.01"
N/A
1.54"
 DS-LL0600 $795.00
6" CF
4.01"
4.00"
1.54"
 DS-LL0600VP $895.00
8" CF
6.02"
N/A
1.54"
 DS-LL0800 $895.00
8" CF
6.02"
6.00"
1.54"
 DS-LL0800VP $1,095.00
10" CF
8.02"
N/A
1.84"
 DS-LL1000 $1,095.00
10" CF
8.02"
6.00"
1.84"
 DS-LL1000VP $1,295.00

* Vessel I.D. does not include gate valve.

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