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System Sub-Assemblies & Components > Vacuum Distribution Systems

Radial Distribution Center - RDC 36 & RDC 48

Radial Distribution Centers facilitate a substrate transfer between multiple chambers in-vacuum

Features

  • Available in 36" and 48" vessel diameters
  • 304 Stainless steel construction
  • Up to eight 8" CF transfer ports
  • Extruded aluminum framework at user-specified height
  • Rack and pinion transfer mechanism

Options:

  • Various pumping options
  • Manual motorization
  • Transfer ports and configuration to suit specific applications

Dimensional Drawings

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