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Radial Distribution Center - RDC 36 & RDC 48

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Photo-SA-RDC_OVERALL.jpg

Photo-SA-RDC_overhead.jpg

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Radial Distribution Centers facilitate a substrate transfer between multiple chambers in-vacuum

Features

• Available in 36" and 48" vessel diameters
• 304 Stainless steel construction
• Up to eight 8" CF transfer ports
• Extruded aluminum framework at user-specified height
• Rack and pinion transfer mechanism

Options:

• Various pumping options
• Manual motorization
• Transfer ports and configuration to suit specific applications

Dimensional Drawings

A0018181-R0

Drawing: A0018181-R0