System Sub-Assemblies & Components

Substrate Fixtures Capabilities

Overview

Our modular substrate fixtures are versatile platens with the necessary ancillaries to hold, rotate, index, heat, cool, and bias a sample or samples. They are designed to easily integrate with our various deposition process modules, shutters, masks, and other periphery to form complete deposition stages for your process requirements.

In addition to our standard, modularized substrate fixtures, we also offer custom solutions. Contact us for more information and to discuss your sample handling needs.

Platen

• Standard platen size up to 6" O.D.
• Accommodates single or multiple substrates
• Designed for batch, load, and unload or load lock transfer
• Stainless steel or high-temp alloys

Rotation

• Substrate rotation and indexing
• Single sample or planetary configurations
• Variable speed control to 20 rpm standard
• DC gear motor, stepper motor, and servo motor options

Heating & Cooling

• Accommodates single or multiple substrates
• Standard heating to 800º C
• Resistive button or quartz lamp configurations
• Manual or PID temperature control with thermocouple
• LN₂ or water-cooling available

Bias & Glow Discharge

• Mild substrate cleaning
• RF or DC to 100 W

Dimensional Drawings

Click on a thumbnail image to open the drawing in a new window.
SingleSampleFixture	MultipleSampleFixture	ContinuousSampleFixture

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