Our modular substrate fixtures are versatile platens with the necessary ancillaries to hold, rotate, index, heat, cool, and bias a sample or samples.
They are designed to easily integrate with our various deposition process modules, shutters, masks, and other periphery to form complete deposition stages for your process requirements.
In addition to our standard, modularized substrate fixtures, we also offer custom solutions.
Contact our specialists at subassemblies@lesker.com for more information and to discuss your sample handling needs.
Platen
Standard platen size up to 6" O.D.
Accommodates single or multiple substrates
Designed for batch, load, and unload or load lock transfer
Stainless steel or high-temp alloys
Rotation
Substrate rotation and indexing
Single sample or planetary configurations
Variable speed control to 20 rpm standard
DC gear motor, stepper motor, and servo motor options
Heating & Cooling
Accommodates single or multiple substrates
Standard heating to 800°C
Resistive button or quartz lamp configurations
Manual or PID temperature control with thermocouple
LN2 or water-cooling available
Bias & Glow Discharge
Mild substrate cleaning
RF or DC to 100 W
Dimensional Drawings
Click on a thumbnail image to open the drawing in a new window.
Product Section from Catalog
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Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]
