System Sub-Assemblies & Components

Selection Guide Overview

Sub-Assembly Selection Guide Overview

Kurt J. Lesker Sub-Assemblies can be an integral part of your vacuum system requirements. Drawing on our extensive experience in component engineering and manufacturing, we can supply a variety of preconfigured “building blocks” to create a system tailored to your specifications.

Whether you require chambers, frames, hoists, pumping packages, valves, gauges, or load locks, these pre-engineered field-proven assemblies and components will save you time and eliminate guesswork when it comes to component compatibility. Our sub-assemblies arrive assembled, tested, and guaranteed to provide dependable, trouble-free performance.

Contact us for more information or to discuss additional components and deposition process modules not listed in our selection guide.

Using Our Easy 5-Step Selection Guide

The Selection Guide is divided into 5 basic categories. Start at Step 1 by selecting the sub-assembly platform desired by specifying the chamber type and size. Then follow some or all of the remaining four steps, noting each step’s order code and additional price, to create your sub-assembly. When you’re finished using the selection guide, contact us (noting your completed sub-assembly order code) to discuss any specific design and process requirements with our sub-assembly engineers before placing your order. It’s that easy!

Step 1: Select Your Platform & Chamber Size

Select a chamber size from one of our seven sub-assembly platform types - glass and stainless steel bell jars, vertical and horizontal cylindrical chambers, spherical chambers, d-shape chambers, and box chambers.

Step 2: Select Your Frame & Accessories

Choose from one of our enclosed welded carbon steel or open style extruded aluminum frames. For bell jars and vertical chambers we also offer additional options, including motorized hoists to access internal fixtures and water cooling trace which is welded to the chamber’s exterior wall.

Step 3: Select Your Pumping Package

Choose from one of our high vacuum (HV) pumping packages. All packages include a high vacuum pump (either turbomolecular, cryogenic, or diffusion style) backed by an appropriately matched oilsealed rotary vane roughing pump. We also offer optional dry roughing pump upgrades for most pumping packages.

Step 4: Select Your Valve Sequencing & Gauging Package

Choose from either a completely automated touch-screen controlled valve sequencing and gauging package or from our standard manually actuated valve control panel and pressure measurement gauges. Both automatic and manual packages come with the appropriate number and type of valves, gauges, and manifolds based on the platform selected and pressure regime desired.

Step 5: Select Your Load Lock Assembly

We offer a wide range of standard load lock styles and sizes to accommodate substrate wafers up to 200mm in diameter. All load lock packages include the load lock vessel chosen and the appropriate linear transporter, turbomolecular pump, and vent valve based on the selected assembly.

Example 1—Bell Jar Sub-Assembly   Sub-Assembly Order Code: 24BS 2BC HDH T2 T2D MSC G1 Package Details:   Price 24BS 24" Bell Jar Platform with baseplate....................................................... $6,675.00 2BC 2-Bay Carbon Steel Frame....................................................................... $1,925.00 HDH Motorized Heavy Duty Hoist Assembly.................................................... $6,550.00 T2 210 L/sec Turbo Pumping Package........................................................ $13,845.00 T2D Dry Scroll Roughing Pump Upgrade...................................................... $3,900.00 MSC Manually-actuated Valve Control Panel Package................................. $825.00 G1 Gauging Package for Turbo Pump Package......................................... $2,785.00     Budgetary Price: $36,505.00