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QDV 450 - Substrate Distribution Vessel
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Applications
- The QDV 450 facilitates multichamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
- The QDV 450 can also function as an entry lock
Features
- All aluminum vessel construction
- Stand alone framework
- Turbomolecular pumping
- Accommodates up to 6" (150 mm) diameter substrates
- Motorized rotary/linear substrate slide mechanism with precision guide way system
- MESC-SEMI rectangular ports
- User select semi-automation
Options:
- External dedicated load lock chamber
- External single or multi wafer storage
Specifications Table
| Number of Transfer Ports | 4 |
| Transfer Mechanism | Precision Guideway Rail System |
| Mechanism Control | Semi-automated DC Servo Motor Activated |
| Cycle Time | 300 sec |
| Substrate Size (max) | 6'' (150 mm) Diameter or Square |
| R-axis (vessel center to transfer fork center) | 35'' (889 mm) with 6'' Transfer Forks |
| Transfer Height (from floor) | 44'' (1118 mm) |
| Z-axis (vertical) | None |
| Payload | 1 lb (454 g) |
| Internal Wafer Storage | No |
| Load Lock Compatible | Yes |
| Vacuum Pumping | 285 l/sec Turbo Pump with Dry Backing Pump |
| Base Pressure (CDE) | 5 X 10-7 Torr |
| System Control | PC-Based Control System (Windows XP) |
| Available Certifications | NRTL, CSA, CE |
| Overall Dim (approx) | 32'' X 32'' X 69'' high (813 mm X 813 mm X 1752 mm) |
| Weight (approx) | 1200 lbs (544 kg) |
Dimensional Drawings
Drawing: QDV450 SideView
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