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System Sub-Assemblies & Components > Vacuum Distribution Systems

QDV 450 - Substrate Distribution Vessel

Applications

  • The QDV 450 facilitates multichamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
  • The QDV 450 can also function as an entry lock

Features

  • All aluminum vessel construction
  • Stand alone framework
  • Turbomolecular pumping
  • Accommodates up to 6" (150 mm) diameter substrates
  • Motorized rotary/linear substrate slide mechanism with precision guide way system
  • MESC-SEMI rectangular ports
  • User select semi-automation

Options:

  • External dedicated load lock chamber
  • External single or multi wafer storage
Product Manual For a Manual for this product. Please click here.

Specifications Table

Number of Transfer Ports4
Transfer MechanismPrecision Guideway Rail System
Mechanism ControlSemi-automated DC Servo Motor Activated
Cycle Time300 sec
Substrate Size (max)6'' (150 mm) Diameter or Square
R-axis
(vessel center to transfer fork center)
35'' (889 mm) with 6'' Transfer Forks
Transfer Height (from floor)44'' (1118 mm)
Z-axis (vertical)None
Payload1 lb (454 g)
Internal Wafer StorageNo
Load Lock CompatibleYes
Vacuum Pumping285 l/sec Turbo Pump with Dry Backing Pump
Base Pressure (CDE)5 X 10-7 Torr
System ControlPC-Based Control System (Windows XP)
Available CertificationsNRTL, CSA, CE
Overall Dim (approx)32'' X 32'' X 69'' high (813 mm X 813 mm X 1752 mm)
Weight (approx)1200 lbs (544 kg)

Dimensional Drawings

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