Vacuum Pumps

Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 10¹¹ for N₂; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
Low pump profile designs for easy mounting
High compression ratios for all gases
Interactive rotor balancing ensures maximum uptime
Self-tuning cables and frequency converters for ease of use
Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
Chemical series available for corrosive applications (LMC models)

Applications:

Mass spectrometry
SIMS
Electron microscopy
Surface science and analysis
Special ultra-clean leak detection
Particle accelerators
Space simulation experiments
Oxygen plasma etching processes
Implant tools for semiconductor processes

Reman Pumps

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Specifications Table

Pump Model	Pumping Speed L/sec (cfm)	Compression Ratios	Ult. Pressure Torr (mBar)	Inlet Flange	Foreline Flange	Max. Foreline Press. Torr (mbar)	Backing Pump Min. Speed - CFM (m3/hr)	Orientation	Cooling Method	Weight lbs (kg)
1003LM/LMC	1080	N₂: 1.0 x 10⁹ He: 8.0 x 10⁴ H₂: 4.0 x 10³	1 x 10^-11 (1.3 x 10^-11)	ISO200-F or 10" CF	KF40	5 (6.6)	17.6 (29.9)	Any (360°)	Water	70.4 (32)
2003LM/LMC	2000	N₂: 1.0 x 10⁹ He: 7.0 x 10⁵ H₂: 1.4 x 10⁴	1 x 10^-11 (1.3 x 10^-11)	ISO250-F or 12" CF	KF40	2 (2.6)	17.6 (29.9)	Any (360°)	Water	121 (55)
203LM/LMC	190	N₂: 1.0 x 10⁹ He: 6.0 x 10⁴ H₂: 4.0 x 10³	1 x 10^-10 (1.3 x 10^-10)	ISO100-K or 6" CF	KF25	4 (5.3)	7 (12)	Any (360°)	Water	19.8 (9)
303LM/LMC	320	N₂: 1.0 x 10⁹ He: 8.0 x 10⁴ H₂: 1.0 x 10⁴	1 x 10^-10 (1.3 x 10^-10)	ISO100-K or 6" CF	KF25	4 (5.3)	7 (12)	Any (360°)	Water	30.8 (14)
3203LM/LMC	3200	N₂: 1.0 x 10⁹ He: 3.0 x 10⁵ H₂: 1.0 x 10⁴	1 x 10^-9 (1.3 x 10^-9)	ISO320-F	KF40	2 (2.6)	53 (90.1)	Any (360°)	Water	155 (70)
403LM/LMC	420	N₂: 1.0 x 10⁹ He: 8.0 x 10⁴ H₂: 1.0 x 10⁴	1 x 10^-10 (1.3 x 10^-10)	ISO160-K or 8" CF	KF25	4 (5.3)	7 (12)	Any (360°)	Water	30.8 (14)
803LM/LMC	800	N₂: 1.0 x 10⁹ He: 8.0 x 10⁴ H₂: 4.0 x 10³	1 x 10^-11 (1.3 x 10^-11)	ISO160-K or 8" CF	KF40	3 (4)	17.6 (29.9)	Any (360°)	Water	68.2 (31)

Pumping Speed Charts

Click on a thumbnail image to open the pump curve in a new window.

Shimadzu_203LM	Shimadzu_303LM	Shimadzu_403LM	Shimadzu_803LM
Shimadzu_1003LM	Shimadzu_2003LM	Shimadzu_3203LM

Ordering Table

Pump Model	Inlet Flange	PartNo	Price
TMP 2003LM	12" CF	SM8143941	£14,640.00
TMP 2003LM	ISO250-F	SM8143943	£14,640.00
TMP 2003LMC	12" CF	SM8143951	£16,051.00
TMP 2003LMC	ISO250-F	SM8143953	£18,447.10
TMP 203LM	6" CF	SM8144541	£6,528.00
TMP 203LM	ISO100-K	SM8144543	£6,528.00
TMP 203LMC	6" CF	SM8144551	£8,025.00
TMP 203LMC	ISO100-K	SM8144553	£8,025.00
TMP 303LM	6" CF	SM8143541	£7,673.00
TMP 303LM	ISO100-K	SM8143543	£7,673.00
TMP 303LMC	6" CF	SM8143551	£9,084.00
TMP 303LMC	ISO100-K	SM8143553	£9,084.00
TMP 3203LM	ISO320-F	SM7843043	£17,903.00
TMP 3203LMC	ISO320-F	SM7843053	P.O.R.
TMP 403LM	8" CF	SM8145541	£8,204.00
TMP 403LM	ISO160-K	SM8145543	£8,204.00
TMP1003LM	10" CF	SM8141041	£9,615.00
TMP1003LM	ISO200-F	SM8141045	£9,615.00
TMP1003LMC	10" CF	SM8141051	£11,026.00
TMP1003LMC	ISO200-F	SM8141055	£11,026.00
TMP403LMC	8" CF	SM8145551	£9,615.00
TMP403LMC	ISO160-K	SM8145553	£9,615.00
TMP803LM	8" CF	SM8145341	£9,084.00
TMP803LM	ISO160-K	SM8145345	£9,084.00
TMP803LMC	8" CF	SM8145351	£10,495.00
TMP803LMC	ISO160-K	SM8145355	£10,495.00

Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]

Accessories Table

Description	For Pump Model(s)	PartNo	Price
Baking Heater (115V/100W)	LM/LMC 203	SM0014101	P.O.R.
Baking Heater (115V/100W)	LM/LMC 303-403	SM0014111	P.O.R.
Baking Heater (208V/200W)	LM/LMC 803-1003	SM7456918	P.O.R.
Baking Heater (208V/600W)	LM/LMC 2003-3203	SM7456915	P.O.R.
Interconnect Cable for Power Supply to Pump (10 m)	All LM/LMC Series Pumps	SM7818710	£972.00
Interconnect Cable for Power Supply to Pump (15 m)	All LM/LMC Series Pumps	SM7818715	£1,219.00
Interconnect Cable for Power Supply to Pump (20m)	All LM/LMC 803-3203 Series Pumps	SM7818720	P.O.R.
Interconnect Cable for Power Supply to Pump (3 m)	All LM/LMC Series Pumps	SM7818703	£574.00
Interconnect Cable for Power Supply to Pump (5 m)	All LM/LMC Series Pumps	SM7818705	£716.00
Motor Power Cable (10 m)	LM/LMC 803-3203	SM7640910	£348.00
Motor Power Cable (15 m)	LM/LMC 803-3203	SM7640915	£509.00
Motor Power Cable (20 m)	LM/LMC 803-3203	SM7640920	£654.00
Motor Power Cable (3 m)	LM/LMC 803-3203	SM7640903	£132.00
Motor Power Cable (5 m)	LM/LMC 803-3203	SM7640905	£182.42
Power Supply for El-D 2003M (200–240 VAC, 1-Øm 50/60 Hz)	2003LM	SM7869102	£2,957.00
Power Supply for El-D 303/403M (110–120 VAC, 1-Øm 50/60 Hz)	203LM, 303LM, 403LM	SM7875801	£2,957.00
Power Supply for El-D 303/403M (200–240 VAC, 1-Øm 50/60 Hz)	203LM, 303LM, 403LM	SM7875802	£2,957.00
Power Supply for El-D 3203M (200–240 VAC, 1-Øm 50/60 Hz)	3203LM	SM7868502	£2,957.00
Power Supply for El-D 803/1003M (200–240 VAC, 1-Øm 50/60 Hz)	803LM, 1003LM	SM7868902	£2,957.00

Questions? Email us: [USA] | [Canada] | [Europe] | [China] | [Rest of World]