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Vacuum Pumps > Turbomolecular Pumps > Magnetically Levitated Pumps

Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

Applications:

Reman Pumps

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Reman Pumps

Specifications Table

Pump Model Pumping
Speed
L/sec (cfm)
Compression
Ratios
Ult. Pressure
Torr (mBar)
Inlet
Flange
Foreline
Flange
Max. Foreline
Press.
Torr (mbar)
Backing Pump Min.
Speed - CFM (m3/hr)
Orientation Cooling Method Weight
lbs (kg)
203LM/LMC
190
N2: 1.0 x 109
He: 6.0 x 104
H2: 4.0 x 103
1 x 10-10
(1.3 x 10-10)
ISO100-K or 6" CF
KF25
4 (5.3)
7 (12)
Any (360°)
Water
19.8 (9)
303LM/LMC
320
N2: 1.0 x 109
He: 8.0 x 104
H2: 1.0 x 104
1 x 10-10
(1.3 x 10-10)
ISO100-K or 6" CF
KF25
4 (5.3)
7 (12)
Any (360°)
Water
30.8 (14)
403LM/LMC
420
N2: 1.0 x 109
He: 8.0 x 104
H2: 1.0 x 104
1 x 10-10
(1.3 x 10-10)
ISO160-K or 8" CF
KF25
4 (5.3)
7 (12)
Any (360°)
Water
30.8 (14)
803LM/LMC
800
N2: 1.0 x 109
He: 8.0 x 104
H2: 4.0 x 103
1 x 10-11
(1.3 x 10-11)
ISO160-K or 8" CF
KF40
3 (4)
17.6 (29.9)
Any (360°)
Water
68.2 (31)
1003LM/LMC
1080
N2: 1.0 x 109
He: 8.0 x 104
H2: 4.0 x 103
1 x 10-11
(1.3 x 10-11)
ISO200-F or 10" CF
KF40
5 (6.6)
17.6 (29.9)
Any (360°)
Water
70.4 (32)
2003LM/LMC
2000
N2: 1.0 x 109
He: 7.0 x 105
H2: 1.4 x 104
1 x 10-11
(1.3 x 10-11)
ISO250-F or 12" CF
KF40
2 (2.6)
17.6 (29.9)
Any (360°)
Water
121 (55)
3203LM/LMC
3200
N2: 1.0 x 109
He: 3.0 x 105
H2: 1.0 x 104
1 x 10-9
(1.3 x 10-9)
ISO320-F
KF40
2 (2.6)
53 (90.1)
Any (360°)
Water
155 (70)

Charts


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Ordering Table

Pump
Model
Inlet
Flange
PartNo Price Add To Cart
TMP 203LM
6" CF
SM8144541 $12,333.00
TMP 203LM
ISO100-K
SM8144543 P.O.R.
TMP 203LMC
6" CF
SM8144551 $15,166.00
TMP 203LMC
ISO100-K
SM8144553 P.O.R.
TMP 303LM
6" CF
SM8143541 $14,500.00
TMP 303LM
ISO100-K
SM8143543 $14,500.00
TMP 303LMC
6" CF
SM8143551 P.O.R.
TMP 303LMC
ISO100-K
SM8143553 P.O.R.
TMP 403LM
8" CF
SM8145541 $15,500.00
TMP 403LM
ISO160-K
SM8145543 P.O.R.
TMP403LMC
8" CF
SM8145551 P.O.R.
TMP403LMC
ISO160-K
SM8145553 P.O.R.
TMP803LM
8" CF
SM1828241 $17,166.00
TMP803LM
ISO160-K
SM1828245 $17,166.00
TMP803LMC
8" CF
SM1828251 P.O.R.
TMP803LMC
ISO160-K
SM1828255 P.O.R.
TMP1003LM
10" CF
SM8141041 $18,166.00
TMP1003LM
ISO200-F
SM8141045 $18,165.00
TMP1003LMC
10" CF
SM8141051 $17,860.00
TMP1003LMC
ISO200-F
SM8141055 P.O.R.
TMP 2003LM
12" CF
SM1828541 $27,667.00
TMP 2003LM
ISO250-F
SM1828543 $27,665.00
TMP 2003LMC
12" CF
SM1828551 P.O.R.
TMP 2003LMC
ISO250-F
SM1828553 P.O.R.
TMP 3203LM
ISO320-F
SM7843043 P.O.R.
TMP 3203LMC
ISO320-F
SM7843053 $36,500.00

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Accessories Table

Description For Pump Model(s) PartNo Price Add To Cart
Baking Heater (115V/100W)
LM/LMC 203
SM0014101 P.O.R.
Baking Heater (115V/100W)
LM/LMC 303-403
SM0014111 P.O.R.
Baking Heater (208V/200W)
LM/LMC 803-1003
SM7456918 P.O.R.
Baking Heater (208V/600W)
LM/LMC 2003-3203
SM7456915 P.O.R.
Interconnect Cable for
Power Supply to Pump (10 m)
All LM/LMC Series Pumps
SM1620010 $1,833.00
Interconnect Cable for
Power Supply to Pump (15 m)
All LM/LMC Series Pumps
SM1620015 $2,300.00
Interconnect Cable for
Power Supply to Pump (20m)
All LM/LMC
803-3203 Series Pumps
SM1620020 P.O.R.
Interconnect Cable for
Power Supply to Pump (3 m)
All LM/LMC Series Pumps
SM1620003 $1,083.00
Interconnect Cable for
Power Supply to Pump (5 m)
All LM/LMC Series Pumps
SM1620005 $1,350.00
Motor Power Cable (10 m)
LM/LMC 803-3203
SM7640910 $565.00
Motor Power Cable (15 m)
LM/LMC 803-3203
SM7640915 $805.00
Motor Power Cable (20 m)
LM/LMC 803-3203
SM7640920 $1,233.00
Motor Power Cable (3 m)
LM/LMC 803-3203
SM7640903 $250.00
Motor Power Cable (5 m)
LM/LMC 803-3203
SM7640905 $300.00
Power Supply for EI-R04M
(200-240 VAC, 1-Øm 50/60 Hz)
TMP 803, 1003, 2003, 3203
SM7898202 $5,583.00
Power Supply for EI-S04M
(110-120 VAC, 1-Øm 50/60 Hz)
TMP 203, 303, 403
SM1804401 $5,583.00
Power Supply for EI-S04M
(200-240 VAC, 1-Øm 50/60 Hz)
TMP 203, 303, 403
SM1804402 $5,583.00

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