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Vacuum Pumps > Dry Mechanical Vacuum Pumps > Dry Scroll Vacuum Pumps

Agilent (Varian) Scroll Pumps

IDP-3 Dry Scroll Pump

This oil-free vacuum pump is the smallest scroll pump made for general vacuum applications. It produces a pump speed of 60 liters/min. with base pressure of 250 millitorr.

  • Hermetic design with fully isolated motor and bearings
  • No mechanisms subject to catastrophic failure

SH-110 Dry Scroll Pump

Dry, hermetic scroll pump. This single-stage pump produces speeds of 110 L/m (on 60 Hz power), with an ultimate pressure of 50 mtorr (0.07 mbar). The SH-110 pump conforms with CE, CSA, and Semi S2-0200 requirements.

  • Moveable exhaust port for flexibility in tight spaces
  • High pumping speed at high pressure enables fast pumpdown
  • Universal 100–239 VAC power for easy installation worldwide
  • Automatic air ballast for effective handling of moisture

TriScroll™ 300 Pump and TriScroll 600 Pump

Multi-stage dry vacuum pumps.

  • Unique TriScroll design
  • Bearing purge port
  • Automatic ballast port

Reman Pumps

(Click on a thumbnail image for more Reman Pumps information in a new window.)

Reman Pumps

Specifications Table

Pump Model
IDP-3
SH-110
TriScroll 300
TriScroll 600
Chemistry
Standard Series
Standard Series
Standard Series
Standard Series
Disp. CFM @ 60 Hz
(m3/hr @ 50 Hz)
2.1 (3)
5 (5.4)
8.8 (12.6)
17.7 (25.2)
Ult. Pressure Torr
(mBar)
0.25 (0.33)
0.05 (0.066)
0.01 (0.013)
0.007 (0.0093)
Motor HP (kW)
0.16 (0.12)
0.25 (0.19)
0.75 (0.56)
1 (0.76)
Inlet Flange
KF16
KF25
KF25
KF40
Exhaust Flange
1/4" Female NPT
(KF16 adapter included)
1/4" Female NPT
(KF16 adapter included)
1/4" Female NPT
(KF16 adapter included)
3/8" Female NPT
(KF25 adapter included)
Weight lbs (kg)
21 (9.5)
43 (19)
57 (26.4)
70 (32)
Noise db(A)
55
56
68
68

Ordering Table

Pump
Model
Inlet
Flange
Ultimate Pressure
(mbar)
Manual PartNo Price Add To Cart
TriScroll 300 Dry Scroll Primary Pump
Single Phase Motor, US Cord
KF25
1 X 10-2
Download PDF
VPTS03001UNIV $6,319.00
TriScroll 300 Dry Scroll Primary Pump
Single Phase Motor, Euro Cord
KF25
1 X 10-2
Download PDF
VPTS03001UNIVEU P.O.R.
TriScroll 300 Dry Scroll Primary Pump
Single Phase Motor, UK Cord
KF25
1 X 10-2
Download PDF
VPTS03001UNIVUK P.O.R.
TriScroll 300 Dry Scroll Primary Pump
Three Phase Motor
KF25
1 X 10-2
Download PDF
VPTS03003UNIV P.O.R.
IDP-3, 220 VAC, 50/60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3A01 P.O.R.
IDP-3, 115 VAC, 60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3B01 $2,826.00
IDP-3, 100 VAC, 50/60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3C01 P.O.R.
IDP-3 with Hour Meter, 220 VAC, 50/60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3A11 P.O.R.
IDP-3 with Hour Meter, 115 VAC, 60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3B11 P.O.R.
IDP-3 with Hour Meter, 100 VAC, 50/60 Hz
KF16
2.5 X 10-1
Download PDF
VIDP3C11 P.O.R.
IDP-3 Scroll Module
KF16
2.5 X 10-1
Download PDF
VIDP3 P.O.R.
SH-110 Single-Scroll Pump
KF25
5 X 10-2
Download PDF
VSH01101UNIV $4,658.00
TriScroll 600 Dry Scroll Primary Pump
Single Phase Motor, US Cord
KF40
7 X 10-3
Download PDF
VPTS06001UNIV $9,873.00
TriScroll 600 Dry Scroll Primary Pump
Single Phase Motor, Euro Cord
KF40
7 X 10-3
Download PDF
VPTS06001UNIVEU P.O.R.
TriScroll 600 Dry Scroll Primary Pump
Single Phase Motor, UK Cord
KF40
7 X 10-3
Download PDF
VPTS06001UNIVUK P.O.R.
TriScroll 600 Dry Scroll Primary Pump
Three Phase Motor
KF40
7.0 X 10-3
Download PDF
VPTS06003UNIV P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

Description PartNo Price Add To Cart
Denmark, 10 A, 220–230 VAC, 2.5 m* V656494225 P.O.R.
Europe, 10 A, 220–230 VAC, 2.5 m* V656494220 P.O.R.
Exhaust Silencer Kit for SH-110 VSH0110EXSLR P.O.R.
India, 10 A, 220-250 VAC, 2.5 m* V656494245 P.O.R.
Israel, 10 A, 230 VAC, 2.5 m* V656494230 P.O.R.
Japan, 12 A, 100 VAC, 2.3 m* V656494240 P.O.R.
Maintenance Kit for TriScroll 300 VPTSS0300MK $906.00
Maintenance Kit for TriScroll 600 VPTSS0600MK P.O.R.
Maintenance Tool Kit for TriScroll 300, TriScroll 600 VPTSS0600TK P.O.R.
North America, 10 A, 230 VAC, 2.5 m* V656494255 P.O.R.
North America, 15 A, 125 VAC, 2.0 m* V656458203 P.O.R.
Replacement Tip Seal Set for TriScroll 300 VPTSS0300TS $295.00
Replacement Tip Seal Set for TriScroll 600 VPTSS0600TS P.O.R.
Switzerland, 10 A, 230 VAC, 2.5 m* V656494235 P.O.R.
Tip Seal Replacement Kit for IDP3 VIDP3TS $198.00
Tip SealReplacement Kit for SH-110 VSH0110TS $166.00
UK/Ireland, 13 A 230 VAC, 2.5 m* V656494250 P.O.R.

NOTE: These cables will fit the IDP3 and SH100 pumps.

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