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Vacuum Pumps > Dry Mechanical Vacuum Pumps > Dry Scroll Vacuum Pumps

Varian Scroll Pumps

IDP-3 Dry Scroll Pump

This oil-free vacuum pump is the smallest scroll pump made for general vacuum applications. It produces a pump speed of 60 liters/min. with base pressure of 250 millitorr.

• Hermetic design with fully isolated motor and bearings
• No mechanisms subject to catastrophic failure

SH-110 Dry Scroll Pump

Dry, hermetic scroll pump. This single-stage pump produces speeds of 110 L/m (on 60 Hz power), with an ultimate pressure of 50 mtorr (0.07 mbar). The SH-110 pump conforms with CE, CSA, and Semi S2-0200 requirements.

• Moveable exhaust port for flexibility in tight spaces
• High pumping speed at high pressure enables fast pumpdown
• Universal 100–239 VAC power for easy installation worldwide
• Automatic air ballast for effective handling of moisture

TriScroll™ 300 Pump and TriScroll 600 Pump

Multi-stage dry vacuum pumps.

• Unique TriScroll design
• Bearing purge port
• Automatic ballast port

Reman Pumps

(Click on a thumbnail image for more Reman Pumps information in a new window.)

Specifications Table

Pump Model	IDP-3	SH-110	TriScroll 300	TriScroll 600
Chemistry	Standard Series	Standard Series	Standard Series	Standard Series
Disp. CFM @ 60 Hz (m3/hr @ 50 Hz)	2.1 (3)	5 (5.4)	8.8 (12.6)	17.7 (25.2)
Ult. Pressure Torr (mBar)	0.25 (0.33)	0.05 (0.066)	0.01 (0.013)	0.007 (0.0093)
Motor HP (kW)	0.16 (0.12)	0.25 (0.19)	0.75 (0.56)	1 (0.76)
Inlet Flange	KF16	KF25	KF25	KF40
Exhaust Flange	1/4" Female NPT (KF16 adapter included)	1/4" Female NPT (KF16 adapter included)	1/4" Female NPT (KF16 adapter included)	3/8" Female NPT (KF25 adapter included)
Weight lbs (kg)	21 (9.5)	43 (19)	57 (26.4)	70 (32)
Noise db(A)	55	56	68	68
Certifications	CE, CSA	CE, CSA	UL®, CE, CSA	UL, CE, CSA

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Ordering Table

Pump Model	PartNo	Price	Add To Cart
TriScroll 600 Dry Scroll Primary Pump Three Phase Motor	VPTS06003UNIV	P.O.R.
IDP-3, 220 VAC, 50/60 Hz	VIDP3A01	P.O.R.
IDP-3, 115 VAC, 60 Hz	VIDP3B01	P.O.R.
IDP-3, 100 VAC, 50/60 Hz	VIDP3C01	P.O.R.
IDP-3 with Hour Meter, 220 VAC, 50/60 Hz	VIDP3A11	P.O.R.
IDP-3 with Hour Meter, 115 VAC, 60 Hz	VIDP3B11	P.O.R.
IDP-3 with Hour Meter, 100 VAC, 50/60 Hz	VIDP3C11	P.O.R.
IDP-3 Scroll Module	VIDP3	P.O.R.
SH-110 Single-Scroll Pump	VSH01101UNIV	P.O.R.
TriScroll 300 Dry Scroll Primary Pump Single Phase Motor, US Cord	VPTS03001UNIV	P.O.R.
TriScroll 300 Dry Scroll Primary Pump Single Phase Motor, Euro Cord	VPTS03001UNIVEU	P.O.R.
TriScroll 300 Dry Scroll Primary Pump Single Phase Motor, UK Cord	VPTS03001UNIVUK	P.O.R.
TriScroll 300 Dry Scroll Primary Pump Three Phase Motor	VPTS03003UNIV	P.O.R.
TriScroll 600 Dry Scroll Primary Pump Single Phase Motor, US Cord	VPTS06001UNIV	P.O.R.
TriScroll 600 Dry Scroll Primary Pump Single Phase Motor, Euro Cord	VPTS06001UNIVEU	P.O.R.
TriScroll 600 Dry Scroll Primary Pump Single Phase Motor, UK Cord	VPTS06001UNIVUK	P.O.R.

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

Description	PartNo	Price	Add To Cart
Denmark, 10 A, 220–230 VAC, 2.5 m*	V656494225	P.O.R.
Europe, 10 A, 220–230 VAC, 2.5 m*	V656494220	P.O.R.
Exhaust Silencer Kit for SH-110	VSH0110EXSLR	P.O.R.
India, 10 A, 220-250 VAC, 2.5 m*	V656494245	P.O.R.
Israel, 10 A, 230 VAC, 2.5 m*	V656494230	P.O.R.
Japan, 12 A, 100 VAC, 2.3 m*	V656494240	P.O.R.
Maintenance Kit for TriScroll 300	VPTSS0300MK	P.O.R.
Maintenance Kit for TriScroll 600	VPTSS0600MK	P.O.R.
Maintenance Tool Kit for TriScroll 300, TriScroll 600	VPTSS0600TK	P.O.R.
North America, 10 A, 230 VAC, 2.5 m*	V656494255	P.O.R.
North America, 15 A, 125 VAC, 2.0 m*	V656458203	P.O.R.
Replacement Tip Seal Set for TriScroll 300	VPTSS0300TS	P.O.R.
Replacement Tip Seal Set for TriScroll 600	VPTSS0600TS	P.O.R.
Switzerland, 10 A, 230 VAC, 2.5 m*	V656494235	P.O.R.
Tip Seal Replacement Kit for IDP3	VIDP3TS	P.O.R.
Tip SealReplacement Kit for SH-110	VSH0110TS	P.O.R.
UK/Ireland, 13 A 230 VAC, 2.5 m*	V656494250	P.O.R.

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

NOTE: These cables will fit the IDP3 and SH100 pumps.

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