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Vacuum Pumps

Adixen™ (Alcatel^®) ATH Series

ATH 200(I):

• Includes an intermediate pumping port intended for continuous high vacuum applications, such as mass spectrometers (this extra port is situated between the inlet port and foreline flange)

ATH 300(CI):

• Intended for corrosive applications
• Includes an intermediate pumping port intended for continuous high vacuum applications, such as mass spectrometers (this extra port is situated between the inlet port and foreline flange)

These pumps provide oil-free evacuation for ensured ultra-clean technology in a variety of applications

NOTE:

• * Listed ACT controllers come with both U.S. and European mains power cable. U.K. cable sold separately.

Reman Pumps

(Click on a thumbnail image for more Reman Pumps information in a new window.)

Specifications Table

Pump Model	ATH 200/200(I)	ATH 300/300(CI)
Pumping Speed L/sec (cfm)	200	250
Compression Ratios	N2: 1.0 x 109 He: 1.0 x 105 H2: N/A	N2: 1.0 x 109 He: 1.0 x 105 H2: N/A
Ult. Pressure Torr (mBar)	3.8 x 10-10 (5 x 10-10)	3.8 x 10-10 (5 x 10-10)
Inlet Flange	ISO100-K or 6" CF	ISO100-K or 6" CF
Foreline Flange	KF16	KF25
Max. Foreline Press.Torr (mbar)	3 (4)	7.5 (10)
Backing Pump Min.Speed CFM (m3/hr)	6 (10)	6 (10)
Orientation	Any (360°)	Any (360°)
Cooling Method	Air or Water	Air or Water
Weight lbs (kg)	21.4 (12.2)	23.2 (14.4)

Pumping Speed Charts

Click on a thumbnail image to open the pump curve in a new window.

Adixen_ATH200-300

Dimensional Drawings

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Adixen_ATH200	Adixen_ATH300	Adixen_ATH300CI

Accessories Table

Description	For Pump Model(s)	PartNo
ACT 202H Controller (100–230 VAC, 50/60 Hz)	ATH 200	AV-110787
ACT 250 Controller (100–230 VAC, 50/60 Hz)	ATH 300	AV-108320
Clamp for KF16 Flange	ATH 200	QF16-075-C
Clamp for KF25 Flange	ATH 300	QF25-100-C
Inlet Screen for 6" CF Flange (2.5 mm)	ATH 200, ATH 300	AV-056844
Inlet Screen for 8" CF Flange (2.5 mm)	ATH 300	AV-056928
Inlet Screen for ISO-100 Flange (2.5 mm)	ATH 200, ATH 300	AV-056844
Inlet Screen for ISO160-K (2.5 mm)	ATH 300	AV-056942
Interconnect Cable for ACT 201H/202H Controller to Pump 3.5 m	ATH 200	AVA460422035
Interconnect Cable for ACT 201H/202H Controller to Pump 5 m	ATH 200	AVA460422050
Interconnect Cable for ACT 250 Controller to Pump 3.5 m	ATH 300	AVA461237035
Interconnect Cable for ACT 250 Controller to Pump 5 m	ATH 300	AVA461237050
KF16 Flanged Vent Valve (115 VAC, 60 Hz)	ATH 200	AV-063171
KF16 Flanged Vent Valve (240 VAC, 50/60 Hz)	ATH 200	AV-063172
KF25 Flanged Vent Valve (115 VAC, 60 Hz)	ATH 300	AV-063089
KF25 Flanged Vent Valve (240 VAC, 50/60 Hz)	ATH 300	AV-063177
Mains Power Cable for ACT Controllers (U.S. plug)	All ATH Series Pumps	AV-104411
Viton® Centering Ring for KF16 Flange	ATH 200	QF16-075-SRV
Viton® Centering Ring for KF25 Flange	ATH 300	QF25-100-SRV
Water Cooling Kit	ATH 200, ATH 300	AV-109259

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