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Vacuum Pumps

Oerlikon Leybold TurboVac SL Series

TurboVac SL 80 Features:

• High pressure foreline tolerance
• Installation in any orientation

TurboVac SL 300 Features:

• High pressure foreline tolerance
• Installation in any orientation
• Delayed venting through the frequency converter TURBO.CRIVE TD 400 (optional)
• Selection of interfaces, RS232 C, RS485 C, Profibus, Ethernet

TurboVac SL 700 Features:

• Highest pumping speed in the DN 160 flange category
• Efficient convection cooling due to a large number of cooling fans
• Installation in any orientation
• Selection of interfaces, RS232 C, RS485 C, Profibus

Reman Pumps

(Click on a thumbnail image for more Reman Pumps information in a new window.)

Specifications Table

Pump Model	TurboVac SL300	TurboVac SL700	TurboVac SL80
Max Gas Throughput — N2 (mbar*l/sec.)	2.9	5.6	2
Pumping Speed L/sec (cfm)	270	690	65
Ult. Pressure Torr (mBar)	7.5 x 10-10 (1.0 x 10-9)	7.5 x 10-9 (1.0 x 10-8)	1.5 x 10-10 (2.0 x 10-10)
Inlet Flange	6" CF	8" CF	4 -1/2" CF
Foreline Flange	KF 16	KF 16	KF 16
Max. Foreline Press.Torr (mbar)	6(8)	11.3 (15)	15(20)
Backing Pump Min.Speed CFM (m3/hr)	~3.5 (~6)	~9 (~15.5)	~2 (~3.3)
Orientation	Any	Any	Any
Cooling Method	Ambient Air (forced air and water cooling available)	Ambient Air (forced air and water cooling available)	Ambient Air (forced air and water cooling available)
Weight lbs (kg)	16.3 ( 7.4)	38.1 (17.3)	6.8 ( 3.1)

Ordering Table

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Pump Model	Inlet Flange	PartNo
SL300	ISO100-K	LH-800170V3005
SL300	6" CF	LH-800170V3006
SL700	ISO160-K	LH-800051V3001
SL700	8" CF	LH-800051V3002
SL80	ISO63-K	LH-800002V3001
SL80	4-1/2" CF	LH-800002V3002

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

Description	For Pump Model(s)	PartNo
Controller Power Cord, UK Plug End	All Controllers	LH-800102V002
Controller Power Cord, US Plug End	All Controllers	LH-99276513
Electronic Frequency Converter, TD400	SL80, SL300	LH-80073V0002
Electronic Frequency Converter, TD700	SL700	LH-80074V0001
Mounting Bracket and Interconnect Cable, Side Mount	SL80	LH-800110V00005
Mounting Bracket and Interconnect Cable, Side Mount	SL300	LH-800110V00006
Mounting Bracket and Interconnect Cable, Side Mount	SL700	LH-800110V00007
Power Supply and cController, TURBO.CONTROL 700	SL700	LH-800101V0001
Power Supply and Controller, TURBO.CONTROL 300	SL80, SL300	LH-800100V0001

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

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