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Oerlikon Leybold TurboVac SL Series
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TurboVac SL 80 Features:
- High pressure foreline tolerance
- Installation in any orientation
TurboVac SL 300 Features:
- High pressure foreline tolerance
- Installation in any orientation
- Delayed venting through the frequency converter TURBO.CRIVE TD 400 (optional)
- Selection of interfaces, RS232 C, RS485 C, Profibus, Ethernet
TurboVac SL 700 Features:
- Highest pumping speed in the DN 160 flange category
- Efficient convection cooling due to a large number of cooling fans
- Installation in any orientation
- Selection of interfaces, RS232 C, RS485 C, Profibus
Reman Pumps
(Click on a thumbnail image for more Reman Pumps information in a new window.)
Specifications Table
| Pump Model | |||
| Max Gas Throughput — N2 (mbar*l/sec.) |
|||
| Pumping Speed L/sec (cfm) |
|||
| Ult. Pressure Torr (mBar) |
(1.0 x 10-9) | (1.0 x 10-8) | (2.0 x 10-10) |
| Inlet Flange | |||
| Foreline Flange | |||
| Max. Foreline Press.Torr (mbar) |
|||
| Backing Pump Min.Speed CFM (m3/hr) |
|||
| Orientation | |||
| Cooling Method | (forced air and water cooling available) | (forced air and water cooling available) | (forced air and water cooling available) |
| Weight lbs (kg) | |||
Ordering Table
| Pump Model |
Inlet Flange |
PartNo |
|---|---|---|
Accessories Table
| Description | For Pump Model(s) | PartNo |
|---|---|---|






