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Vacuum Pumps > Turbomolecular Pumps > Turbo Single Stage Pumps > Turbo Single Stage Pumps

Oerlikon Leybold Chemical TMP TurboVac Series

Click to view Photo-PU-T70-1100.jpg
Photo-PU-T70-1100.jpg

TMP Chemical Series pumps are engineered for the aggressive environments of corrosive gas processes, such as reactive ion and ion beam etching and reactive sputtering

ORDERING NOTE: All pumps require the following accessories for operation: Controller, Interconnect Cable and Power Cord.

Reman Pumps

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Reman Pumps

Specifications Table

Pump Model
TMP151C
TMP361C
TMP361C
TMP1000C
TMP1100C
TMP600C
Pumping Speed
L/sec (cfm)
145
345
400
1100
1050
560
Compression Ratios
N2: 1.0 x 109
He: 2.0 x 104
H2: 8.0 x 102
Ar: 8 x 102
N2: 1.0 x 109
He: 2.0 x 104
H2: 3.0 x 103
Ar: 8 x 102
N2: 1.0 x 109
He: 2.0 x 104
H2: 3.0 x 103
Ar: 8 x 102
N2: 1.0 x 109
He: 5.0 x 104
H2: 2.0 x 103
Ar: 2 x 103
N2: 1.0 x 105
He: N/A
H2: 1.0 x 104
Ar: 1.0 x 104
N2: > 109
He: 2.0 x 104
H2: 1.1 x 103
Ar: N/A
Ult. Pressure Torr
(mBar)
7.5 x 10-11
(1 x 10-10)
7.5 x 10-11
(1 x 10-10)
7.5 x 10-11
(1 x 10-10)
1 x 10-10
(1.3 x 10-10)
2.2 x 10-10
(3 x 10-10)
<10-10
(<10-10)
Inlet Flange
ISO100-K or 6" CF
ISO100-K
ISO160-K
10" CF
ISO250-K
ISO160-K or 8" CF
Foreline Flange
KF25
KF25
KF25
KF40
ISO63-K
KF40
Max. Foreline Press.Torr
(mbar)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
3.75 x 10-1
(5 x 10-1)
7.5 x 10-2
(1 x 10-1)
0.75 x 10-1
(1 x 10-1)
Backing Pump Min.Speed
CFM (m3/hr)
11.7 (19.8)
18.2 (30.8)
18.2 (30.8)
18.2 (30.8)
12.9 (22)
18.2 (30.8)
Orientation
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Any (360°)
Cooling Method
Water Standard
(air available)
Water Standard
(air available)
Water Standard
(air available)
Water Standard
(air available)
Water Standard
Water Standard
(air available)
Weight lbs (kg)
17 (8)
26 (12)
26 (12)
55 (25)
48 (22)
37.5 (17)

Charts

Click to view Oerlikon TMP151C
Oerlikon TMP151C

Chart: Oerlikon TMP151C

Oerlikon TMP151C
Oerlikon TMP361C
Oerlikon TMP600C
Oerlikon TMP1000C
Oerlikon TMP1100C

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Dimensional Drawings

Leybold TMP151C
Leybold TMP151C

Drawing: Leybold TMP151C

Leybold TMP151C
Leybold TMP361C
Leybold TMP600C
Leybold TMP1000C
Leybold TMP1100C

E-mail KJLC Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Ordering Table

Pump
Model		 Description Inlet
Flange		 PartNo Price Add To Cart
TMP151C
Chemical (TMP Series)
6" CF
 LH-899252 P.O.R.
TMP151C
Chemical (TMP Series)
ISO100-K
 LH-85635 $8,630.00
TMP361C
Chemical (TMP Series)
ISO100-K
 LH-85675 P.O.R.
TMP361C
Chemical (TMP Series)
ISO160-K
 LH-85677 $12,490.00
TMP1000C
Chemical (TMP Series)
10" CF
 LH-11764 P.O.R.
TMP1100C
Chemical (TMP Series)
ISO250-K
 LH800150V0032 P.O.R.
TMP600C
Chemical (TMP Series)
ISO160-K
 LH800150V0015 $13,310.00
TMP600C
Chemical (TMP Series)
8" CF
 LH800150V0017 P.O.R.

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Accessories Table

Description For Pump Model(s) PartNo Price Add To Cart
Adaptive Viton Centering Ring
for KF10 to KF16 Flange
All TMP Series Pumps
 QF10-16-ASRV $10.30
Air Cooling Kit (115 VAC)
TMP 600C, TMP1000C
 LH-170016 P.O.R.
Interconnect Cable for
TD20 Controller to Pump (3 m)
TMP151(C), TMP361(C),TMP600C, TMP1000C, TMP1100C
 LH-85765 $215.00
Interconnect Cable for
TD20 Controller to Pump (5 m)
TMP151(C), TMP361(C),TMP600C, TMP1000C, TMP1100C
 LH-85766 $440.00
Power Cord for TD20
US Plug, 118 VAC, 3 m
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
 LH99276513 P.O.R.
Power Cord for TD20
US Plug, 220 VAC, 3 m
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
 LH-800102V002 P.O.R.
TD20 Controller
(100–240 VAC, 50/60 HZ)
TMP151(C), TMP361(C), TMP600C, TMP1000C, TMP1100C
 LH80075V005 P.O.R.
Vent Valve—115 VAC, 50/60 Hz
(normally open/KF10 flanged)
All TMP Series Pumps
 LH-899838 $465.00

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