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Vacuum Pumps

Oerlikon Leybold Chemical TMP TurboVac Series

Chemical TMP TurboVac Series Features:

• TMP Chemical Series pumps are engineered for the aggressive environments of corrosive gas processes, such as reactive ion and ion beam etching and reactive sputtering

Reman Pumps

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Specifications Table

Pump Model	TMP1000C	TMP1100C	TMP151C	TMP361C	TMP361C	TMP600C
Pumping Speed L/sec (cfm)	1100	1050	145	345	400	560
Compression Ratios	N2: 1.0 x 109 He: 5.0 x 104 H2: 2.0 x 103 Ar: 2 x 103	N2: 1.0 x 105 He: N/A H2: 1.0 x 104 Ar: 1.0 x 104	N2: 1.0 x 109 He: 2.0 x 104 H2: 8.0 x 102 Ar: 8 x 102	N2: 1.0 x 109 He: 2.0 x 104 H2: 3.0 x 103 Ar: 8 x 102	N2: 1.0 x 109 He: 2.0 x 104 H2: 3.0 x 103 Ar: 8 x 102	N2: > 109 He: 2.0 x 104 H2: 1.1 x 103 Ar: N/A
Ult. Pressure Torr (mBar)	1 x 10-10 (1.3 x 10-10)	2.2 x 10-10 (3 x 10-10)	7.5 x 10-11 (1 x 10-10)	7.5 x 10-11 (1 x 10-10)	7.5 x 10-11 (1 x 10-10)	<10-10 (<10-10)
Inlet Flange	10" CF	ISO250-K	ISO100-K or 6" CF	ISO100-K	ISO160-K	ISO160-K or 8" CF
Foreline Flange	KF40	ISO63-K	KF25	KF25	KF25	KF40
Max. Foreline Press.Torr (mbar)	3.75 x 10-1 (5 x 10-1)	7.5 x 10-2 (1 x 10-1)	3.75 x 10-1 (5 x 10-1)	3.75 x 10-1 (5 x 10-1)	3.75 x 10-1 (5 x 10-1)	0.75 x 10-1 (1 x 10-1)
Backing Pump Min.Speed CFM (m3/hr)	18.2 (30.8)	12.9 (22)	11.7 (19.8)	18.2 (30.8)	18.2 (30.8)	18.2 (30.8)
Orientation	Any (360°)	Any (360°)	Any (360°)	Any (360°)	Any (360°)	Any (360°)
Cooling Method	Water Standard (air available)	Water Standard	Water Standard (air available)	Water Standard (air available)	Water Standard (air available)	Water Standard (air available)
Weight lbs (kg)	55 (25)	48 (22)	17 (8)	26 (12)	26 (12)	37.5 (17)

Pumping Speed Charts

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Oerlikon_TMP1000C

Dimensional Drawings

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Leybold_TMP151C	Leybold_TMP361C	Leybold_TMP1000C	Leybold_TMP1100C

Ordering Table

Pump Model	Description	Inlet Flange	PartNo	Price	Add To Cart
TMP1000C	Chemical (TMP Series)	10" CF	LH-11764	£13,480.00
TMP1000C	Chemical (TMP Series)	ISO250-K	LH800150V0032	P.O.R.
TMP151C	Chemical (TMP Series)	ISO100-K	LH-85635	£5,020.00
TMP151C	Chemical (TMP Series)	6" CF	LH-899252	£5,121.00
TMP361C	Chemical (TMP Series)	ISO100-K	LH-85675	£7,484.00
TMP361C	Chemical (TMP Series)	ISO160-K	LH-85677	P.O.R.
TMP600C	Chemical (TMP Series)	ISO160-K	LH800150V0015	P.O.R.
TMP600C	Chemical (TMP Series)	8" CF	LH800150V0017	P.O.R.

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

Accessories Table

Description	For Pump Model(s)	PartNo	Price	Add To Cart
Adaptive Viton Centering Ring for KF10 to KF16 Flange	All TMP Series Pumps	QF10-16-ASRV	£4.00
Air Cooling Kit (115 VAC)	TMP 600C, TMP1000C	LH-170016	P.O.R.
Interconnect Cable for TD20 Controller to Pump (3 m)	TMP151, TMP361,TMP600C, TMP1000C, TMP1100C	LH-85765	£127.00
Interconnect Cable for TD20 Controller to Pump (5 m)	TMP151, TMP361,TMP600C, TMP1000C, TMP1100C	LH-85766	£253.00
Power Cord for TD20 US Plug, 118 VAC, 3 m	TMP151, TMP361,TMP600C, TMP1000C, TMP1100C	LH99276513	P.O.R.
Power Cord for TD20 US Plug, 220 VAC, 3 m	TMP151, TMP361,TMP600C, TMP1000C, TMP1100C	LH-800102V002	P.O.R.
TD20 Controller (100–240 VAC, 50/60 HZ)	TMP151, TMP361, TMP600C, TMP1000C, TMP1100C	LH80075V005	P.O.R.
Vent Valve—115 VAC, 50/60 Hz (normally open/KF10 flanged)	All TMP Series Pumps	LH-899838	£216.00

Questions? Email us:   [USA]   |   [Canada]   |   [Europe]   |   [China]   |   [Rest of World]

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