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The following chart is a quick-reference guide that splits all Turbomolecular into two categories, standard and chemical. It then arranges the pumps by displacement within each category. Refer to the corresponding product page for more detailed information on a particular pump model.
Click on a column heading to sort by that column.
| Manufacturer | Pump Model |
Chemistry | Inlet Flange |
Pumping Speed L/sec (cfm) |
Disp.CFM (m3/hr) |
Ult. Pressure Torr (mbar) |
Product Webpage |
| Shimadzu | 1003LM/LMC | N/A | ISO200-F or 10" CF | 1080 | N/A | 1 x 10-11 (1.3 x 10-11) |
Click To View |
| Shimadzu | 2003LM/LMC | N/A | ISO250-F or 12" CF | 2000 | N/A | 1 x 10-11 (1.3 x 10-11) |
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| Shimadzu | 203LM/LMC | N/A | ISO100-K or 6" CF | 190 | N/A | 1 x 10-10 (1.3 x 10-10) |
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| Shimadzu | 303LM/LMC | N/A | ISO100-K or 6" CF | 320 | N/A | 1 x 10-10 (1.3 x 10-10) |
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| Shimadzu | 3203LM/LMC | N/A | ISO320-F | 3200 | N/A | 1 x 10-9 (1.3 x 10-9) |
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| Shimadzu | 403LM/LMC | N/A | ISO160-K or 8" CF | 420 | N/A | 1 x 10-10 (1.3 x 10-10) |
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| Shimadzu | 803LM/LMC | N/A | ISO160-K or 8" CF | 800 | N/A | 1 x 10-11 (1.3 x 10-11) |
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| Adixen | ATH 200/200(I) | N/A | ISO100-K or 6" CF | 200 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Adixen | ATH 300/300(CI) | N/A | ISO100-K or 6" CF | 250 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Adixen | ATH 1300M/1300MT |
N/A | ISO200-F | 1250 | N/A | 8.0 x 10-9 | Click To View |
| Adixen | ATH 1600M/1600MT |
N/A | ISO250-F | 1500 | N/A | 6.0 x 10-9 | Click To View |
| Adixen | ATH 2300M/2300MT |
N/A | ISO250-F | 2100 | N/A | 4.0 x 10-9 | Click To View |
| Adixen | ATH 500M/500MT |
N/A | ISO160-K | 500 | N/A | 1.4 x 10-8 | Click To View |
| Adixen | ATP 100 | N/A | ISO100-K or 6" CF | 100 | N/A | 3.7 x 10-9 (5 x 10-9) |
Click To View |
| Adixen | ATP 100C | N/A | ISO100-K or 6" CF | 100 | N/A | 3.7 x 10-9 (5 x 10-9) |
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| Adixen | ATP 150 | N/A | ISO100-K or 6" CF | 140 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Adixen | ATP 150C | N/A | ISO100-K or 6" CF | 140 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Adixen | ATP 400 | N/A | ISO160-K or 8" CF | 400 | N/A | 6 x 10-10 (8 x 10-10) |
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| Adixen | ATP 400C | N/A | ISO160-K or 8" CF | 400 | N/A | 6 x 10-10 (8 x 10-10) |
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| Adixen | ATP 80 | N/A | ISO63-K or 4-1/2" CF | 80 | N/A | 3.7 x 10-9 (5 x 10-9) |
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| Adixen | ATP 80C | N/A | ISO63-K or 4-1/2" CF | 80 | N/A | 3.7 x 10-9 (5 x 10-9) |
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| Adixen | ATP 900 | N/A | ISO200-K or 10" CF | 900 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Adixen | ATP 900C | N/A | ISO200-K or 10" CF | 900 | N/A | 3.8 x 10-10 (5 x 10-10) |
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| Edwards | EXT255DX | N/A | 6" CF | 220 | N/A | 3.8 x 10-9 (5.0 x 10-9) |
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| Edwards | EXT556H | N/A | 8" CF | 540 | N/A | < 10 x 10-10 (< 10 x 10-10) |
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| Edwards | EXT75DX | N/A | 4-1/2" CF | 61 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Pfeiffer | HiPace 10 | N/A | 4-1/2" CF | 10 | N/A | 1.5 x 10-10 (2.0 x 10-10) |
Click To View |
| Pfeiffer | HiPace 2400MC | N/A | 12" CF | 2100 | N/A | 7.5 x 10-10 (1 x 10-9) |
Click To View |
| Pfeiffer | HiPace 300 | N/A | 6" CF | 260 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
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| Pfeiffer | HiPace 300C | N/A | 6" CF | 245 | N/A | 1.0 x 10-8 (1.3 x 10-8) |
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| Pfeiffer | HiPace 3400MC | N/A | ISO320-F | 2950 | N/A | 7.5 x 10-10 (1 x 10-9) |
Click To View |
| Pfeiffer | HiPace 400 | N/A | 6" CF | 355 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
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| Pfeiffer | HiPace 700 | N/A | 8" CF | 685 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
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| Pfeiffer | HiPace 80 | N/A | 4-1/2" CF | 67 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
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| Pfeiffer | HiPace 1200/1200C |
N/A | 10" CF | 1250 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
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| Pfeiffer | HiPace 1500/1500C |
N/A | 12" CF | 1450 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
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| Pfeiffer | HiPace 1800/1800C |
N/A | 10" CF | 1450 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
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| Pfeiffer | HiPace 2300/2300C |
N/A | 12" CF | 1900 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
Click To View |
| Adixen | MDP 5011 | N/A | ISO63-K | 7.5 | N/A | 7.5 x 10-7 (1 x 10-6) |
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| Adixen | MDP 5011 CP | N/A | ISO63-K | 7.5 | N/A | 7.5 x 10-7 (1 x 10-6) |
Click To View |
| Edwards | nEXT240D | N/A | 6" CF | 240 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
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| Edwards | nEXT300D | N/A | 6" CF | 300 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
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| Edwards | nEXT400D | N/A | 8" CF | 400 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
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| Edwards | STP-iX455 | N/A | 8" CF | 450 | N/A | 10-10 (10-10) |
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| Edwards | STP-L301 / STP-LL301C |
N/A | 6" CF | 260 | N/A | 10-8 (10-8) |
Click To View |
| Edwards | STP-XA2703C | N/A | ISO250-F | 2650 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STP-XA4503C | N/A | ISO250-F | 4000 | N/A | 10-10 (10-9) |
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| Edwards | STP-XZ3203C | N/A | ISO250-F | 3200 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STP1003 / STP1003C |
N/A | 10" CF | 1000 | N/A | 10-10 (5E-8 for C version) |
Click To View |
| Edwards | STP301 / STP301C |
N/A | 6" CF | 300 | N/A | 10-10 (10-9 for C version) |
Click To View |
| Edwards | STP603 / STP603C |
N/A | 8" CF | 650 | N/A | 10-10 (5E-8 for C version) |
Click To View |
| Edwards | STPA1303C | N/A | 10" CF | 1300 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STPA1603C | N/A | 10" CF | 1600 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STPA2203C | N/A | ISO250-F | 2200 | N/A | 10-8 (10-8) |
Click To View |
| Edwards | STPA803C | N/A | 8" CF | 800 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STPH301C | N/A | 6" CF | 300 | N/A | 10-9 (10-9) |
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| Edwards | STPH451C | N/A | 8" CF | 450 | N/A | 10-9 (10-9) |
Click To View |
| Leybold | TMP1000C | N/A | 10" CF | 1100 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Leybold | TMP1100C | N/A | ISO250-K | 1050 | N/A | 2.2 x 10-10 (3 x 10-10) |
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| Leybold | TMP151 | N/A | ISO100-K or 6" CF | 145 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Leybold | TMP151C | N/A | ISO100-K or 6" CF | 145 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361 | N/A | ISO100-K or 6" CF | 345 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361 | N/A | ISO-K160 or 8" CF | 400 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361C | N/A | ISO100-K | 345 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361C | N/A | ISO160-K | 400 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP50 | N/A | KF40 | 33 | N/A | 3.75 x 10-8 (5 x 10-8) |
Click To View |
| Leybold | TMP50 | N/A | ISO63-K or 4-1/2" CF | 55 | N/A | 3.75 x 10-8 (5 x 10-8) |
Click To View |
| Leybold | TMP600C | N/A | ISO160-K or 8" CF | 560 | N/A | <10-10 (<10-10) |
Click To View |
| Varian | Turbo-V 301 | N/A | 8" CF | 280 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 551 | N/A | 8" CF | 550 | N/A | 7.5 x 10-11 (1.0 x 10-10) |
Click To View |
| Varian | Turbo-V 701 | N/A | 10" CF | 690 | N/A | 7.5 x 10-11 (1.0 x 10-10) |
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| Varian | Turbo-V 81 M | N/A | 4.5" CF | 77 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 81 T | N/A | 4.5" CF | 77 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Leybold | TurboVac SL300 | N/A | 6" CF | 270 | N/A | 7.5 x 10-10 (1.0 x 10-9) |
Click To View |
| Leybold | TurboVac SL700 | N/A | 8" CF | 690 | N/A | 7.5 x 10-9 (1.0 x 10-8) |
Click To View |
| Leybold | TurboVac SL80 | N/A | 4 -1/2" CF | 65 | N/A | 1.5 x 10-10 (2.0 x 10-10) |
Click To View |
