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The following chart is a quick-reference guide that splits all Turbomolecular into two categories, standard and chemical. It then arranges the pumps by displacement within each category. Refer to the corresponding product page for more detailed information on a particular pump model.
Click on a column heading to sort by that column.
| Manufacturer | Pump Model |
Chemistry | Inlet Flange |
Pumping Speed L/sec (cfm) |
Disp.CFM (m3/hr) |
Ult. Pressure Torr (mbar) |
Product Webpage |
| Adixen | MDP 5011 | N/A | ISO63-K | 7.5 | N/A | 7.5 x 10-7 (1 x 10-6) |
Click To View |
| Adixen | MDP 5011 CP | N/A | ISO63-K | 7.5 | N/A | 7.5 x 10-7 (1 x 10-6) |
Click To View |
| Leybold | TMP50 | N/A | KF40 | 33 | N/A | 3.75 x 10-8 (5 x 10-8) |
Click To View |
| Adixen | ATP 80 | N/A | ISO63-K or 4-1/2" CF | 80 | N/A | 3.7 x 10-9 (5 x 10-9) |
Click To View |
| Adixen | ATP 100 | N/A | ISO100-K or 6" CF | 100 | N/A | 3.7 x 10-9 (5 x 10-9) |
Click To View |
| Adixen | ATP 150 | N/A | ISO100-K or 6" CF | 140 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Adixen | ATP 400 | N/A | ISO160-K or 8" CF | 400 | N/A | 6 x 10-10 (8 x 10-10) |
Click To View |
| Adixen | ATP 900 | N/A | ISO200-K or 10" CF | 900 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Adixen | ATP 80C | N/A | ISO63-K or 4-1/2" CF | 80 | N/A | 3.7 x 10-9 (5 x 10-9) |
Click To View |
| Adixen | ATP 100C | N/A | ISO100-K or 6" CF | 100 | N/A | 3.7 x 10-9 (5 x 10-9) |
Click To View |
| Adixen | ATP 150C | N/A | ISO100-K or 6" CF | 140 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Adixen | ATP 400C | N/A | ISO160-K or 8" CF | 400 | N/A | 6 x 10-10 (8 x 10-10) |
Click To View |
| Adixen | ATP 900C | N/A | ISO200-K or 10" CF | 900 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Leybold | TMP50 | N/A | ISO63-K or 4-1/2" CF | 55 | N/A | 3.75 x 10-8 (5 x 10-8) |
Click To View |
| Leybold | TMP151 | N/A | ISO100-K or 6" CF | 145 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Leybold | TMP361 | N/A | ISO100-K or 6" CF | 345 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361 | N/A | ISO-K160 or 8" CF | 400 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP151C | N/A | ISO100-K or 6" CF | 145 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TurboVac SL80 | N/A | 4 -1/2" CF | 65 | N/A | 1.5 x 10-10 (2.0 x 10-10) |
Click To View |
| Leybold | TurboVac SL300 | N/A | 6" CF | 270 | N/A | 7.5 x 10-10 (1.0 x 10-9) |
Click To View |
| Leybold | TurboVac SL700 | N/A | 8" CF | 690 | N/A | 7.5 x 10-9 (1.0 x 10-8) |
Click To View |
| Pfeiffer | HiPace 10 | N/A | 4-1/2" CF | 10 | N/A | 1.5 x 10-10 (2.0 x 10-10) |
Click To View |
| Pfeiffer | HiPace 80 | N/A | 4-1/2" CF | 67 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Pfeiffer | HiPace 300 | N/A | 6" CF | 260 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Pfeiffer | HiPace 300C | N/A | 6" CF | 245 | N/A | 1.0 x 10-8 (1.3 x 10-8) |
Click To View |
| Leybold | TMP361C | N/A | ISO100-K | 345 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP361C | N/A | ISO160-K | 400 | N/A | 7.5 x 10-11 (1 x 10-10) |
Click To View |
| Leybold | TMP1000C | N/A | 10" CF | 1100 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Leybold | TMP1100C | N/A | ISO250-K | 1050 | N/A | 2.2 x 10-10 (3 x 10-10) |
Click To View |
| Adixen | ATH 200/200(I) | N/A | ISO100-K or 6" CF | 200 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Adixen | ATH 300/300(CI) | N/A | ISO100-K or 6" CF | 250 | N/A | 3.8 x 10-10 (5 x 10-10) |
Click To View |
| Pfeiffer | HiPace 400 | N/A | 6" CF | 355 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Adixen | ATH 500M/500MT |
N/A | ISO160-K | 500 | N/A | 1.4 x 10-8 | Click To View |
| Adixen | ATH 1300M/1300MT |
N/A | ISO200-F | 1250 | N/A | 8.0 x 10-9 | Click To View |
| Adixen | ATH 1600M/1600MT |
N/A | ISO250-F | 1500 | N/A | 6.0 x 10-9 | Click To View |
| Adixen | ATH 2300M/2300MT |
N/A | ISO250-F | 2100 | N/A | 4.0 x 10-9 | Click To View |
| Edwards | STP-L301 / STP-LL301C |
N/A | 6" CF | 260 | N/A | 10-8 (10-8) |
Click To View |
| Edwards | STPH301C | N/A | 6" CF | 300 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STP301 / STP301C |
N/A | 6" CF | 300 | N/A | 10-10 (10-9 for C version) |
Click To View |
| Edwards | STP-iX455 | N/A | 8" CF | 450 | N/A | 10-10 (10-10) |
Click To View |
| Edwards | STPH451C | N/A | 8" CF | 450 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STP603 / STP603C |
N/A | 8" CF | 650 | N/A | 10-10 (5E-8 for C version) |
Click To View |
| Edwards | STPA803C | N/A | 8" CF | 800 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STP1003 / STP1003C |
N/A | 10" CF | 1000 | N/A | 10-10 (5E-8 for C version) |
Click To View |
| Edwards | STPA1303C | N/A | 10" CF | 1300 | N/A | 10-9 (10-9) |
Click To View |
| Edwards | STPA1603C | N/A | 10" CF | 1600 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STPA2203C | N/A | ISO250-F | 2200 | N/A | 10-8 (10-8) |
Click To View |
| Edwards | STP-XA2703C | N/A | ISO250-F | 2650 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STP-XZ3203C | N/A | ISO250-F | 3200 | N/A | 10-10 (10-9) |
Click To View |
| Edwards | STP-XA4503C | N/A | ISO250-F | 4000 | N/A | 10-10 (10-9) |
Click To View |
| Pfeiffer | HiPace 700 | N/A | 8" CF | 685 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Pfeiffer | HiPace 1200/1200C |
N/A | 10" CF | 1250 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
Click To View |
| Pfeiffer | HiPace 1500/1500C |
N/A | 12" CF | 1450 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
Click To View |
| Pfeiffer | HiPace 1800/1800C |
N/A | 10" CF | 1450 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
Click To View |
| Pfeiffer | HiPace 2300/2300C |
N/A | 12" CF | 1900 | N/A | 1.0 x 10-7 (1.3 x 10-7) |
Click To View |
| Edwards | EXT75DX | N/A | 4-1/2" CF | 61 | N/A | 5.0 x 10-10 (6.6 x 10-10) |
Click To View |
| Edwards | EXT255DX | N/A | 6" CF | 220 | N/A | 3.8 x 10-9 (5.0 x 10-9) |
Click To View |
| Edwards | EXT556H | N/A | 8" CF | 540 | N/A | < 10 x 10-10 (< 10 x 10-10) |
Click To View |
| Edwards | nEXT240D | N/A | 6" CF | 240 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Edwards | nEXT300D | N/A | 6" CF | 300 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Edwards | nEXT400D | N/A | 8" CF | 400 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 81 M | N/A | 4.5" CF | 77 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 81 T | N/A | 4.5" CF | 77 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 301 | N/A | 8" CF | 280 | N/A | 3.75 x 10-10 (5.0 x 10-10) |
Click To View |
| Varian | Turbo-V 551 | N/A | 8" CF | 550 | N/A | 7.5 x 10-11 (1.0 x 10-10) |
Click To View |
| Varian | Turbo-V 701 | N/A | 10" CF | 690 | N/A | 7.5 x 10-11 (1.0 x 10-10) |
Click To View |
| Pfeiffer | HiPace 2400MC | N/A | 12" CF | 2100 | N/A | 7.5 x 10-10 (1 x 10-9) |
Click To View |
| Pfeiffer | HiPace 3400MC | N/A | ISO320-F | 2950 | N/A | 7.5 x 10-10 (1 x 10-9) |
Click To View |
| Shimadzu | 203LM/LMC | N/A | ISO100-K or 6" CF | 190 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Shimadzu | 303LM/LMC | N/A | ISO100-K or 6" CF | 320 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Shimadzu | 403LM/LMC | N/A | ISO160-K or 8" CF | 420 | N/A | 1 x 10-10 (1.3 x 10-10) |
Click To View |
| Shimadzu | 803LM/LMC | N/A | ISO160-K or 8" CF | 800 | N/A | 1 x 10-11 (1.3 x 10-11) |
Click To View |
| Shimadzu | 1003LM/LMC | N/A | ISO200-F or 10" CF | 1080 | N/A | 1 x 10-11 (1.3 x 10-11) |
Click To View |
| Shimadzu | 2003LM/LMC | N/A | ISO250-F or 12" CF | 2000 | N/A | 1 x 10-11 (1.3 x 10-11) |
Click To View |
| Shimadzu | 3203LM/LMC | N/A | ISO320-F | 3200 | N/A | 1 x 10-9 (1.3 x 10-9) |
Click To View |
| Leybold | TMP600C | N/A | ISO160-K or 8" CF | 560 | N/A | <10-10 (<10-10) |
Click To View |
