Atomic Layer Deposition System Questionnaire

Please fill in this form as completely as possible and a KJLC representive will contact you as quickly as possible to provide further information.

Required Information

Application/ Field of work:
Materials to be deposited Oxides: Metals: Nitrides: Other:
Substrate material:
Substrate size & dimensions:
Substrate temperature required:
Number of precursor inputs required:
Type of precursor inputs required High vapor pressure liquid or solid: Low vapor pressure liquid or solid: Reactant gas:
Optional features required ICP Plasma source: Load Lock package: High vacuum package: Dry Pump package: 500C Substrate Heater: RGA Pkg Ellipsometer Pkg
Budget to purchase ALD system:
Order placement date:
Delivery required:
Comments

Contact Information (Required) 

Name:		Company:
E-mail:		Phone:
Street:		City:
State:		ZIP:

Are you a returning KJLC customer? Required Yes No

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