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ALD Reactant Delivery System (RDS) Designs

Photo-SY-ALD_GasPanel.jpg

Reactant delivery system for ALD 8000 shown with MFCs, valves, and gas lines (top bays) and pumping/LN2 trapping (bottom bays)

Features

• Designed to cover a wide range of delivery requirements
• RDS available for solid, liquid, or vapor sources
• High and low vapor pressure source capabilities
• Various metering options, including mass flow controllers
• Bubblers available
• Computer-controlled heated delivery lines available

Example Gas Delivery Schematics

Gas delivery schematic (above) for ALD 380 shown with optional low vapor pressure reactant input		Gas delivery schematic (above) for ALD 1800 shown with multiple reactant and carrier gas inputs
(Click on image to view in a new window.)

Process Control Software Overview

Our intuitive software is SEMI E95 compliant and features a wide range of process feedback information and user-input control.

Learn more about our software.