NANO-38 Thermal Evaporation System

Our new NANO-38 deposition system is a compact, low cost evaporator able to facilitate sequential depositions. Its simple, full enclosure design is based on the success of our PVD-75 system and includes an integrated touch-screen controller.

Deposition Techniques

Thermal evaporation(up to 3 sources for sequential depositions)

Common Features

18" high x 12" deep/wide D-shape 304 stainless steel chamber
Aluminum door with rectangular viewport
3-pocket thermal evaporator with standard 2 kW power supply
Fixed substrate fixture (platen)
Turbomolecular pumping
Integrated touch-screen controller and film monitor
Fully enclosed "zero" clean room footprint design

Options

Thin film controller
Motorized rotating substrate fixture
Pneumatic deposition shutters

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