Vacuum Systems

PVD Series Deposition Systems

pvd75.jpg

Our PVD Series deposition systems feature a modular design configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. We offer 3 models to choose from, including our popular PVD-75™ (pictured) which features a full enclosure and a "zero" clean room footprint when flush-mounted.

Typical Applications

PVD75_comp_cntrl_1.jpg

Integrated computer control shown on PVD-75 system

 
PVD_Panel_Inset.jpg

Manual touch screen control

 
PVD75_chmbr_intrnl.jpg

Close-up of D-shape chamber with TORUS sputter sources

  • R& D thin film depositions
  • Small batch production

Common Features & Options

  • D-shape 304 stainless steel chamber
  • Aluminum door with viewport
  • Turbomolecular or cryogenic pumping
  • Manual touch-screen or computer-controlled process automation
  • Single, multiple, or custom substrate fixtures
  • Planetary substrate fixture (optional)
  • Load lock (optional)

Deposition Techniques

  • Magnetron sputtering (RF, DC, or Pulsed-DC)
  • Electron beam evaporation
  • Thermal evaporation
  • Organic evaporation for OLED/PLED and organic electronics

Process Options

  • Substrate heating and cooling
  • Substrate biasing
  • Ion source for substrate cleaning/assisted deposition
PVD75_closed.jpg

PVD-75™ & PVD-250 System Platforms

Designed for university, industrial, and government lab R&D applications

KLJC3000clipped.jpg

PVD-500 box coater

  • 24" high x 14" wide/deep D-shape chamber (PVD-75)
  • 30" high x 24" wide/deep D-shape chamber (PVD-250)
  • Available with up to 4 TORUS® circular magentron sputter sources
  • Available with 6 pocket electron beam evaporation source
  • Available with 5cm or 10cm filamentless ion source
  • Fully enclosed "zero" clean room footprint mounting (optional)
 

PVD-500 System Platform

Spacious chamber design ideal for use as a production box coater

  • 30" high x 32 " wide/deep D-shape chamber (500 litre)
  • Available with multiple TORUS® production-scale sputter sources
  • Available with multi-pocket 10kW electron beam evaporation source
  • Available with multiple thermal evaporation sources
  • Available with up to 6 low-temp organic evaporation sources
  • Available with 3cm filamentless ion source

Download interactive 3D model of PVD-75

  Click to view

You can rotate and zoom, highlight components for more information, make parts transparent to view obstructed components, and much more using the free IPA Webview Plugin.

Click here to download the PVD-75 3D Model

 
MS Internet Explorer 5.5 or higher and IPA Webview plugin required  

Download interactive 3D model of PVD-250

  Click to view

You can rotate and zoom, highlight components for more information, make parts transparent to view obstructed components, and much more using the free IPA Webview Plugin.

Click here to download the PVD-250 3D Model

 
MS Internet Explorer 5.5 or higher and IPA Webview plugin required