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Thin Film Deposition Systems > PVD Systems (Physical Vapor Deposition Systems) > PVD System Series – Economical, Modular Design for Multiple Thin Film Deposition Applications

PVD (Physical Vapor Deposition) Thin Film System Series Overview

PVD Series—Modular design configured to suit a variety of thin film deposition applications, typically for research and development or small batch production.

Leading medical device manufacturers use our PVD line of systems to produce biocompatible films.


Integrated computer control
shown on PVD-75 system


Manual touch screen control


Close-up of D-shape chamber
with TORUS sputter sources

Typical Applications

  • R&D Thin Film Deposition
  • Small Batch Production

Deposition Techniques Available

  • Magnetron Sputtering (RF, DC, or Pulsed DC)
  • Electron Beam Evaporation
  • Thermal Evaporation
  • Organic Evaporation, Including OLED/PLED and Organic Electronics Applications

Process Options

  • Heating
  • Cooling
  • Bias
  • Ion Source for Substrate Cleaning/Assisted Deposition


  • D-shape 304 stainless steel chamber
  • Aluminum door with large viewport
  • Turbomolecular or cryogenic pumping
  • Manual touch-screen or recipe-controlled PC based process automation
  • Single, multiple, or custom substrate fixtures


  • Planetary substrate fixture
  • Load lock

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