Vacuum Systems

PVD Series Deposition Systems

Our PVD Series deposition systems feature a modular design configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. We offer 3 models to choose from, including our popular PVD-75™ (pictured) which features a full enclosure and a "zero" clean room footprint when flush-mounted.

Typical Applications

Integrated computer control shown on PVD-75 system

Manual touch screen control

Close-up of D-shape chamber with TORUS sputter sources

R& D thin film depositions
Small batch production

Common Features & Options

D-shape 304 stainless steel chamber
Aluminum door with viewport
Turbomolecular or cryogenic pumping
Manual touch-screen or computer-controlled process automation
Single, multiple, or custom substrate fixtures
Planetary substrate fixture (optional)
Load lock (optional)

Deposition Techniques

Magnetron sputtering (RF, DC, or Pulsed-DC)
Electron beam evaporation
Thermal evaporation
Organic evaporation for OLED/PLED and organic electronics

Process Options

Substrate heating and cooling
Substrate biasing
Ion source for substrate cleaning/assisted deposition

PVD-75™ & PVD-250 System Platforms Designed for university, industrial, and government lab R&D applications	PVD-500 box coater
24" high x 14" wide/deep D-shape chamber (PVD-75) 30" high x 24" wide/deep D-shape chamber (PVD-250) Available with up to 4 TORUS® circular magentron sputter sources Available with 6 pocket electron beam evaporation source Available with 5cm or 10cm filamentless ion source Fully enclosed "zero" clean room footprint mounting (optional)

PVD-500 System Platform Spacious chamber design ideal for use as a production box coater
30" high x 32 " wide/deep D-shape chamber (500 litre) Available with multiple TORUS® production-scale sputter sources Available with multi-pocket 10kW electron beam evaporation source Available with multiple thermal evaporation sources Available with up to 6 low-temp organic evaporation sources Available with 3cm filamentless ion source

Download interactive 3D model of PVD-75

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Download interactive 3D model of PVD-250