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PVD Series Overview
(Click on image to view in a new window) |
PVD Series—Modular design configured to suit a variety of thin film deposition applications, typically for research and development or small batch production.
Leading medical device manufacturers use our PVD line of systems to produce biocompatible films.
Integrated computer control
shown on PVD-75 system
Manual touch screen control
Close-up of D-shape chamber
with TORUS sputter sources
Typical Applications
- R&D Thin Film Deposition
- Small Batch Production
Deposition Techniques Available
- Magnetron Sputtering (RF, DC, or Pulsed DC)
- Electron Beam Evaporation
- Thermal Evaporation
- Organic Evaporation, Including OLED/PLED and Organic Electronics Applications
Process Options
- Heating
- Cooling
- Bias
- Ion Source for Substrate Cleaning/Assisted Deposition
Features
- D-shape 304 stainless steel chamber
- Aluminum door with large viewport
- Turbomolecular or cryogenic pumping
- Manual touch-screen or recipe-controlled PC based process automation
- Single, multiple, or custom substrate fixtures
Optional
- Planetary substrate fixture
- Load lock
