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KJLC® Awarded a Patent for its Atomic Layer Deposition System and Process

November 28, 2017 |

The Kurt J. Lesker Company® (KJLC®), a global manufacturer of vacuum systems, thin film deposition tools and vacuum components, today announced that the United States Patent and Trademark Office has issued US patent number 9,695,510, 'Atomic Layer Deposition Apparatus and Process', covering the design of an atomic layer deposition system and the process to use that system to deposit highly precise and conformal thin films. This proprietary technology substantially reduces the interaction of various precursor gas molecules with the internal surfaces of the reaction chamber and enables actual focusing of gas streams to more effectively coat the surface of arbitrarily large substrates.

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Tags: Default | Deposition Techniques | INNOVATE | Systems | Vacuum Science



KJLC Featured at the 70th Annual Gaseous Electronics Conference

November 28, 2017 |

On 6 November 2017 our Jason Hrebik and J.R. Gaines delivered presentations at the 70th annual conference on Gaseous Electronics (GEC2017), held at the Doubletree Hotel, Green Tree, PA. Hrebik displayed his expertise through a presentation on the capabilities and benefits of the High Power Impulse Sputtering (HiPIMs) process and provided the audience with an introduction to the new KJLC Impulse™ power supply. The conference featured a group of presentations from industrial companies, including LAM Research, Applied Materials, and Tokyo Electron. Gaines capped off the afternoon session with a review of the practical issues associated with the integration and application of plasmas in Plasma-Enhanced Atomic Layer Deposition (PEALD).

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Tags: Default | Deposition Techniques | Vacuum Science



Fresh Insights on the Flow of Electrons by Direct Observation of Spoke Evolution in Magnetron Sputtering

October 25, 2017 |

In a July 2017 publication, Drs. André Anders and Yuchen Yang provide an enhanced description of the flows and energy of electrons at the face of a magnetron sputter cathode. By combining a unique imaging process and a linear cathode (target) the researchers were able to generate a series of time/space images which shows plasma instabilities driven by the motion of electrons, within the cathode's magnetic field. The images show the effects on plasma flow for both conventional DC magnetron sputtering (dcMS) and also high power impulse magnetron sputtering (HiPIMs). The full paper is available on line at http://aip.scitation.org/doi/10.1063/1.4994192.

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Tags: Default | Deposition Techniques | INNOVATE | Vacuum Science



Industry Leading Water Cooling

May 15, 2017 |

With the dramatic growth expected in many industries which require high temperature vacuum systems such as space simulation systems, 3D printing of metal components, the manufacture of single crystals for the LED and semiconductors and others, alternatives to traditional water cooling approaches may offer performance gains coupled with reduced costs. Temperature control for these applications can take several forms. In the case of space simulation, the vacuum system is designed to duplicate the temperature (and pressure) extremes that will be experienced by satellites in earth orbit, or beyond, which may require rapid cycling from -130°C to +130°C. For crystal growing, using methods such as the Kyropoulos process, where a crystal is 'pulled' from a melt of material, such as silicon, the internal temperature of a vacuum system may reach +1,450°C. In one case, the temperature control system for the vacuum chamber is designed to provide a user-specified profile of cold-to-hot and in another the system is required to safely mitigate and protect the system from the extreme temperature required to liquify silicon.

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Tags: Default | Vacuum Science



Novel Deposition System Designs for Thin Film Materials Research

January 25, 2017 |

Next generation vacuum deposition systems must evolve in order to keep pace with the ongoing evolution of thin film materials and devices. Researchers seeking to pursue new areas, such as biomedical devices, 2D materials, specialized magnetics and oxide-based films need new tools to support their work. The frontiers of materials science, particularly at the intersection of biology and thin film deposition, have brought new materials into the vacuum space that were never intended to be there.

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Tags: Default | Deposition Techniques | INNOVATE | Systems | Vacuum Science



Introducing KJLC 704-T Diffusion Pump Oil For Harsh Environments

December 30, 2016 |

Users of diffusion pumps for harsh processes or in non-optimized vacuum systems may be seeing crystallization of solids in their pump fluid. This crystallization results from decomposition of fluids due to over exposure to oxygen at high temperatures. This break down alters the viscosity of the pump fluid and may also obstruct flow passages. Further, the build-up of solids and crystals on internal surfaces can lead to inefficient heat transfer which may make operation of the pump unstable.

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Tags: Default | Vacuum Fluids & Greases | Vacuum Science



System for Sputtering Uniform Optical Coatings on Flat and Curved Surfaces without Masks

November 23, 2016 |

Many optical coating applications require excellent uniformity in both the physical thickness and optical properties of the deposited films. As interest grows in sophisticated coatings on challenging substrate shapes, such as aspheres, high performance eyewear, beveled cell phone screens, camera lenses and a variety of other products, meeting these uniformity requirements becomes more difficult.

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Tags: Default | Deposition Techniques | INNOVATE | Systems | Vacuum Science



Vacuum-Enabled Thin Film Deposition Advances Energy Storage Technologies

July 20, 2016 |

The concept of energy storage in thin films has been around for a long time. One of the early uses of the term 'Thin Film Battery' (TFB) was in a 1976 patent by Exxon [1]. Nearly 20 years later, Bates and his team at Oak Ridge National Laboratory (ORNL) patented the sputter-based, all solid state battery utilizing the electrolyte LiPON [2]. The Bates battery paired LiCoO2 and Li3PO4-xNx (LiPON) to produce a 4 volt secondary cell.

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Tags: Default | Deposition Techniques | INNOVATE | Systems | Vacuum Science



Alternative Heat Transfer Fluids Reduce Greenhouse Gas Emissions for the Semiconductor Industry

July 11, 2016 |

Greenhouse gas (GHG) emissions from the semiconductor industry comprise a tiny contribution to the global climate change issue, at less than <0.2% (ref 1). However, with a strategic act of brilliance, the industry has adopted voluntary measures, going back to the mid '90s. These measures have enabled this industry to reduce its contribution to emissions that may cause global climate change by more than 30%, when the goal of the initial program was only a 10% reduction. For most other industries that would have been an unachievable feat (ref 2, World Semiconductor Council).

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Tags: Vacuum Fluids & Greases



KJLC Expands Material Information

June 28, 2016 |

"Enabling technology for a better world" is Kurt J Lesker Company’s mission. It’s what our employees come to work thinking about each day. In keeping with this goal, we strive to provide technical advice and share our experiences with our customers. We are continually adding useful technical information to our product pages, including appropriate crucibles/crucible liners for many of our materials. Z-ratios, vapor pressures, maximum power recommendations, and densities are available on the majority of our evaporation material and sputtering target web pages.

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Tags: Default | Deposition Materials



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