Box Chambers
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Box chambers are rectangular vacuum vessels often with large entry doors. Characteristically, the door is o-ring sealed, mounted on hinges that support the door's weight, and have a single closure/clamp device.
Box chambers are often selected for applications that require
- Temporary shields—to prevent deposition or outgassing products sticking to the chamber walls
- Outgassing of large components—since the door allows access
- Batch evaporation or sputter coating—where component cycle-time is short and product changes/pump down is frequent
- Outgassing, de-aeration, impregnation—with short cycle times and quick product turn-around.
- Frequent pump downs—since that implies frequent door openings for which the hinged, single clamp door is convenient
Standard Features
- 304 stainless steel plate with ISO utility ports and a 6061 aluminum hinged door
- Aluminum door features a dovetailed–o-ring groove and includes a Viton® o-ring
- Rectangular view port in center of door (viewing area of 3-1/4" x 5-1/4")
- O-ring sealing box chambers are capable of reaching pressures in the 10-7 torr range—clean, dry, and empty
Standard Sizes
- 12" x 12" x 24" (30.5 x 30.5 x 61cm) I.D.
- 24" x 24" x 24" (61 x 61 x 61cm) I.D.
- 24" x 24" x 30" (61 x 61 x 76cm) I.D.
Available Options
- Replace KF port with CF style port and/or add additional flanged ports
- Water cooling—trace
- Standard pumping and gauging packages
- Standard frames—carbon steel and extruded aluminum with or without rack mounting
Downloads & Ordering
All of our standard chamber designs may be purchased through our website. Please contact us to discuss any required modifications or options. Additionally, we offer the following Chamber Downloads (see table below) to assist our customers with their chamber selection:
- Dimensional 2D Drawings in Adobe PDF format
- Engineering Files in DXF (2D) and STP (3D) formats
- Interactive 3D Models using the free IPA Webview Plugin (MS IE 5.5 or higher required)
For problems downloading files, viewing 3D models, or other related questions read our Chamber Downloads FAQ.
Dimensional Drawings
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| BX1224S | BX2424S | 24x24x30_2D | ||
Ordering Table
| Description | Ports | Drawing | 2D CAD | 3D CAD | 3D Model | PartNo | Price (USA) |
Add To Cart |
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