D-Shape Chambers
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The D-shape chamber combines the best features of cylindrical and box chamber designs. It features a box chamber's large area access door coupled with the cylindrical chamber's thin wall and compatibility with disk-shaped substrate fixtures.
Standard Features
- Body constructed from 304 stainless steel
- ISO-F style ports machined into the top and bottom with aluminum blanking flanges and aluminum centering rings with fluorocarbon o-ring and clamps
- ISO-K style half nipple utility ports on rear
- 6061 aluminum hinged door features a dovetailed–o-ring groove and includes a Viton® o-ring
- Rectangular view port in center of door (viewing area of 3-1/4" x 5-1/4")
- Extruded aluminum frame
- O-ring sealing d-shape chambers are capable of reaching pressures in the 10-7 torr range—clean, dry, and empty
Standard Sizes
- 14" x 25.25" x 14.69" (35.56 x 64.13 x 37.31cm) I.D.
Available Options
- Replace KF port with CF style port and/or add additional flanged ports
- Water cooling—trace
- Standard pumping and gauging packages
- Replace standard "open" frame with rack mounting frame
- Door swing -- left or right side hinge mount
Downloads & Ordering
All of our standard chamber designs may be purchased through our website. Please contact us to discuss any required modifications or options. Additionally, we offer the following Chamber Downloads (see table below) to assist our customers with their chamber selection:
- Dimensional 2D Drawings in Adobe PDF format
- Engineering Files in DXF (2D) and STP (3D) formats
- Interactive 3D Models using the free IPA Webview Plugin (MS IE 5.5 or higher required)
For problems downloading files, viewing 3D models, or other related questions read our Chamber Downloads FAQ.
Dimensional Drawings
| Click on a thumbnail image to open the drawing in a new window. | ||||
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Ordering Table
| Description | Ports | Drawing | 2D CAD | 3D CAD | 3D Model | PartNo | Price (USA) |
Add To Cart |
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