Deposition Sources
Filamentless Ion Sources
The Kurt J. Lesker Company Ion Source systems include the ion source, power supply, cabling, feedthroughs, flexible internal utilities, swivel/rotating mounting collar, and choice of grids. Our patented ion sources do not use thermionic tips nor filaments when generating plasma and neutralizing up to 85% of energy. These ion sources are offered in 3 cm, 5 cm, and 10 cm configurations.
Features:
- 3cm, 5cm, and 10cm Configurations
- Filamentless Sources
- Reactive Gas Compatible
- Internal or Flange Mount
- Collimated or Focused Grids
- UHV Compatible
Applications include:
- Plasma Cleaning
- Oxiding
- Nitriding
- Surface Modification
| Ion Source Specifications | |||
| 3 cm Source | 5 cm Source | 10 cm Source | |
| Filaments | none | none | none |
| Process Gas | Argon (standard) | Argon (standard) Oxygen (optional) |
Argon (standard) Oxygen (optional) |
| Ion Beam Currents | 2 mA at 25 eV to 7 mA at 1000 eV |
2 mA at 25 eV to 35 mA at 1200 eV |
2 mA at 25 eV to 67 mA at 1200 eV |
| Ion Optics | Molybdenum collimated optics (standard) Divergent, convergent, and graphite ion optics (optional) |
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| Ion Beam Uniformity | ± 10% in the inner 75% of beam diameter | ||
| Mounting | Remote Mount (standard) 8" min. CF Flange (optional) |
Remote Mount (standard) 8" min. CF Flange (optional) |
Remote Mount (standard) 10" min. CF Flange (optional) |
| Feedthrough | Dual 1" Gas and Electrical Feedthrough (standard) 2.75" CF Flanged Feedthrough (optional) |
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| Source Material | 300/400 Series Stainless Steel, High Purity, High Temperature Fired Ceramic | ||
| Required Gas Flow | 7 to 15 sccm to sustain the plasma | ||
| Operational Pressure (based on 2000 L/s effective pumping speed for N2) |
1.2x10-4 to 4x10-4 Torr |
9x10-5 to 2x10-4 Torr |
9x10-5 to 2x10-4 Torr |
| Nominal Pump Speed | 1000 liters/sec | 2000 liters/sec | 2000 liters/sec |
| Emitter Power Supply (constant current controlled) |
100 V to 475 V @ 0 to 225 mA | 100 V to 475 V @ 0 to 225 mA | 100 V to 525 V @ 0 to 225 mA |
| Anode Power Supply (constant voltage controlled) |
0 to 1000 V @ 2 to 7 mA | 0 to 1000 V @ 2 to 35 mA | 0 to 1000 V @ 2 to 67 mA |
| Accelerator Power Supply (constant voltage controlled) |
0 to 100 V @ 1 to 2 mA | ||
| Dimensions: | |||
| Ion Source | 3" dia. x 5.26" length | 5.5" dia. x 7" length | 6.1" dia. x 8.45" length |
| DC Switching Power Supply | 19" rack mount (5.25" height x 18" depth) | ||
For additional product information and pricing contact our ion source specialists at ionsource@lesker.com or call us at 1.800.245.1656
