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Aluminum (Al) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Aluminum is one of the most common metals in the world. It can be found in kitchen utensils, cars, street lights, and the popular aluminum foil food packaging. Aluminum is a silvery-white, metallic material. It is light, malleable, ductile, and non-magnetic under normal conditions. It has a density of 2.7 g/cc, a melting point of 660°C, and a vapor pressure of 10-4 Torr at 1,010°C. Although it is not a strong material, it is a good conductor of heat and electricity and is able to form an oxide layer that is resistant to corrosion. Due to its high reactivity, it is rarely found in nature as a free element. When evaporated in a vacuum, aluminum layers form a reflective coating found on telescopes, automotive headlamps, mirrors, packages, and toys. It is widely used in the aerospace, automotive lighting, OLED, and optical industries.


Specifications

Material TypeAluminum
SymbolAl
Atomic Weight26.9815386
Atomic Number13
Color/AppearanceSilvery, Metallic
Thermal Conductivity235 W/m.K
Melting Point (°C)660
Coefficient of Thermal Expansion23.1 x 10-6/K
Theoretical Density (g/cc)2.7
Z Ratio1.08
SputterDC
Max Power Density*
(Watts/Square Inch)
150
Type of BondIndium, Elastomer
CommentsAlloys W/Mo/Ta. Flash evap or use BN crucible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


SDS
Click here for the Aluminum SDS.
Product Datasheet
Click for a downloadable datasheet on the Aluminum Al Sputtering Targets.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Aluminum 1.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX401A2 $58.00
Aluminum 1.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX501A2 $115.00
Aluminum 1.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX401A4 $90.00
Aluminum 1.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX501A4 $120.00
Aluminum 1.30" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX501.3K4 P.O.R.
Aluminum 2.00" Dia. x 0.0625" Thick 99.99% All Standard Guns EJTALXX402A1 P.O.R.
Aluminum 2.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX402A2 $88.00
Aluminum 2.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX502A2 $100.00
Aluminum 2.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX402A4 $103.00
Aluminum 2.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTALXX402K4 P.O.R.
Aluminum 2.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX502A4 P.O.R.
Aluminum 2.00" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX502K4 P.O.R.
Aluminum 2.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 2 EJTALXX502TK4 P.O.R.
Aluminum 3.00" Dia. x 0.0625" Thick 99.99% All Standard Guns EJTALXX403A1 P.O.R.
Aluminum 3.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX403A2 $105.00
Aluminum 3.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX503A2 $155.00
Aluminum 3.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX403A4 $128.00
Aluminum 3.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTALXX403K4 P.O.R.
Aluminum 3.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX503A4 $165.00
Aluminum 3.00" Dia. x 0.250" Thick 99.999% U.S. Gun EJTALXX503K4 P.O.R.
Aluminum 3.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 3 EJTALXX503TK4 P.O.R.
Aluminum 4.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX404A2 $160.00
Aluminum 4.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX504A2 $273.00
Aluminum 4.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX404A4 $175.00
Aluminum 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 EJTALXX404TK4 P.O.R.
Aluminum 4.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX504A4 $225.00
Aluminum 4.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 4 EJTALXX504TK4 P.O.R.
Aluminum 5.00" Dia x 0.125" Thick 99.99% All Standard Guns EJTALXX405A2 P.O.R.
Aluminum 6.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX406A2 $225.00
Aluminum 6.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX506A2 P.O.R.
Aluminum 6.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX406A4 P.O.R.
Aluminum 6.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX506A4 P.O.R.
Aluminum 8.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALXX408A2 P.O.R.
Aluminum 8.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALXX508A2 P.O.R.
Aluminum 8.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALXX408A4 P.O.R.
Aluminum 8.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALXX508A4 P.O.R.

 

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