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Aluminum Oxide (Al2O3) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Specifications

Material TypeAluminum Oxide
SymbolAl2O3
Color/AppearanceWhite, Crystalline Solid
Melting Point (°C)2,072
Theoretical Density (g/cc)3.97
Z Ratio0.336
SputterRF-R
Max Power Density*
(Watts/Square Inch)
20
Type of BondIndium, Elastomer
CommentsSapphire excellent in E-beam; forms smooth, hard films.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

NOTE:

  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Aluminum Oxide SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Aluminum Oxide 1.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX401A2 $275.00
Aluminum Oxide 1.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALOX501A2 P.O.R.
Aluminum Oxide 1.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX401A4 $300.00
Aluminum Oxide 1.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX501A4 P.O.R.
Aluminum Oxide 2.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX402A2 $415.00
Aluminum Oxide 2.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALOX502A2 P.O.R.
Clearance Item Aluminum Oxide 2.0" Dia. x 0.250" Thick 99.5% All Standard Guns EJTALOX252A4 P.O.R.
Aluminum Oxide 2.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX402A4 $450.00
Aluminum Oxide 2.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX502A4 P.O.R.
Clearance Item Aluminum Oxide 3.0" Dia. x 0.125" Thick 99.5% All Standard Guns EJTALOX253A2 P.O.R.
Aluminum Oxide 3.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX403A2 $530.00
Aluminum Oxide 3.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALOX503A2 P.O.R.
Clearance Item Aluminum Oxide 3.0" Dia. x 0.250" Thick 99.5% All Standard Guns EJTALOX253A4 P.O.R.
Aluminum Oxide 3.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX403A4 $595.00
Aluminum Oxide 3.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX503A4 P.O.R.
Clearance Item Aluminum Oxide 4.0" Dia. x 0.125" Thick 99.5% All Standard Guns EJTALOX254A2 P.O.R.
Aluminum Oxide 4.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX404A2 $785.00
Aluminum Oxide 4.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALOX504A2 P.O.R.
Clearance Item Aluminum Oxide 4.0" Dia. x 0.250" Thick 99.5% All Standard Guns EJTALOX254A4 P.O.R.
Aluminum Oxide 4.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX404A4 $895.00
Aluminum Oxide 4.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX504A4 P.O.R.
Aluminum Oxide 6.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX406A2 P.O.R.
Aluminum Oxide 6.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTALOX506A2 P.O.R.
Clearance Item Aluminum Oxide 6.0" Dia. x 0.250" Thick 99.5% All Standard Guns EJTALOX256A4 P.O.R.
Aluminum Oxide 6.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX406A4 P.O.R.
Aluminum Oxide 6.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX506A4 P.O.R.
Aluminum Oxide 8.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTALOX408A2 P.O.R.
Aluminum Oxide 8.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTALOX408A4 P.O.R.
Aluminum Oxide 8.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTALOX508A4 P.O.R.
Note Clearance Item = Limited availability and specially priced.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Aluminum Oxide 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUALOX402A4 P.O.R.
Aluminum Oxide 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUALOX402T4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUALOX403A4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.99% Elastomer 3.00" Dia x 0.125" Thick U.S. Gun EJUALOX403K4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.092" Thick Standard TORUS 3 EJUALOX403T4 P.O.R.
Aluminum Oxide 4.00" Dia x 0.125" Thick 99.99% Indium 4.00" Dia x 0.125" Thick All Standard Guns EJUALOX404A4 P.O.R.
Aluminum Oxide 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUALOX502A4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.999% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUALOX503A4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick All Standard Guns EJUALOX503E4 P.O.R.
Aluminum Oxide 3.00" Dia x 0.125" Thick 99.999% Elastomer 3.00" Dia x 0.125" Thick TORUS Mag Keeper 3 EJUALOX503TK4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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