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Gold (Au) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Gold is one of the most valuable and sought-after metals in the world. Since its discovery during ancient times, it has been utilized as jewelry, coins, and tools. Still, in today's economy, its most popular use is as jewelry. Gold is one of the more beautiful precious metals with a lustrous, yellow sheen. It has a melting point of 1,064°C, a density of 19.3 g/cc, and a vapor pressure of 10-4 Torr at 1,132°C with its ideal evaporation temperature being around 1,400°C. It is soft, dense, malleable, ductile, and an excellent conductor of heat and electricity. Deposited films of gold are used as layers in the production of semiconductors, sensors, batteries, and data storage.


Specifications

Material TypeGold
SymbolAu
Atomic Weight196.966569
Atomic Number79
Color/AppearanceGold, Metallic
Thermal Conductivity320 W/m.K
Melting Point (°C)1,064
Coefficient of Thermal Expansion14.2 x 10-6/K
Theoretical Density (g/cc)19.3
Z Ratio0.381
SputterDC
Max Power Density*
(Watts/Square Inch)
100
Type of BondIndium, Elastomer
CommentsFilms soft; not very adherent.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

Precious Metals Recycling Program We offer a precious metals recycling program designed to reduce your material costs. Click here for details.

Volume Pricing Available Volume pricing is available upon request. Please contact international@lesker.com with your required quantity.

SDS
Click here for the Gold SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Gold 1.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTAUXX401A1 P.O.R.
Gold 1.00" Dia. x 0.063" Thick 99.999% All Standard Guns EJTAUXX501A1 P.O.R.
Gold 1.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTAUXX401A2 P.O.R.
Gold 1.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTAUXX501A2 P.O.R.
Gold 1.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX401A4 P.O.R.
Gold 1.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX501A4 P.O.R.
Gold 2.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTAUXX402A1 P.O.R.
Gold 2.00" Dia. x 0.063" Thick 99.999% All Standard Guns EJTAUXX502A1 P.O.R.
Gold 2.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTAUXX402A2 $7,598.00
Gold 2.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTAUXX502A2 P.O.R.
Gold 2.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX402A4 P.O.R.
Gold 2.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX502A4 P.O.R.
Gold 3.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTAUXX403A1 $8,505.00
Gold 3.00" Dia. x 0.063" Thick 99.999% All Standard Guns EJTAUXX503A1 P.O.R.
Gold 3.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTAUXX403A2 $16,829.00
Gold 3.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTAUXX503A2 P.O.R.
Gold 3.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX403A4 P.O.R.
Gold 3.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX503A4 P.O.R.
Gold 4.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTAUXX404A2 P.O.R.
Gold 4.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTAUXX504A2 P.O.R.
Gold 4.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX404A4 P.O.R.
Gold 4.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX504A4 P.O.R.
Gold 5.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX505A4 P.O.R.
Gold 6.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX406A4 P.O.R.
Gold 6.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX506A4 P.O.R.
Gold 8.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTAUXX408A4 P.O.R.
Gold 8.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTAUXX508A4 P.O.R.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Gold 1.00" Dia x 0.125" Thick 99.99% Indium 1.00" Dia x 0.125" Thick All Standard Guns EJUAUXX401A4 P.O.R.
Gold 2.00" Dia x 0.125" Thick 99.99% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUAUXX402A4 P.O.R.
Gold 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUAUXX403A4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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