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Chromium (Cr) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Chromium is one of the most popular metals in the world. Chromium is a silvery, lustrous, hard, and brittle metal known for its high mirror polish and corrosion resistance. It has a melting point of 1,857°C, a density of 7.2 g/cc, and a vapor pressure of 10-4 Torr at 1,157°C. Its name comes from the Greek word "chroma", which means color, due to its very colorful compounds. It is widely used in the automobile industry to form a shiny coating found on wheels and bumpers. Chromium is used in many vacuum applications such as automotive glass coatings, photovoltaic cell fabrication, battery fabrication, and decorative and corrosion resistant coatings.


Specifications

Material TypeChromium
SymbolCr
Atomic Weight51.9961
Atomic Number24
Color/AppearanceSilvery, Metallic
Thermal Conductivity94 W/m.K
Melting Point (°C)1,857
Coefficient of Thermal Expansion4.9 x 10-6/K
Theoretical Density (g/cc)7.2
Z Ratio0.305
SputterDC
Max Power Density*
(Watts/Square Inch)
80
Type of BondIndium, Elastomer
CommentsFilms very adherent. High rates possible.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


SDS
Click here for the Chromium SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Chromium 1.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX351A2 $83.00
Chromium 1.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX351A4 $90.00
Chromium 2.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX352A2 $135.00
Chromium 2.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX352A4 $185.00
Chromium 2.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTCRXX352K4 P.O.R.
Chromium 2.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 2 EJTCRXX352TK4 P.O.R.
Chromium 3.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX353A2 $195.00
Chromium 3.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX353A4 $245.00
Chromium 3.00" Dia. x 0.250" Thick 99.95% U.S. Gun EJTCRXX353K4 P.O.R.
Chromium 3.00" Dia. x 0.250" Thick 99.95% TORUS Mag Keeper 3 EJTCRXX353TK4 P.O.R.
Chromium 4.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX354A2 $360.00
Chromium 4.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX354A4 $415.00
Chromium 6.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX356A2 P.O.R.
Chromium 6.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX356A4 $560.00
Chromium 8.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTCRXX358A2 P.O.R.
Chromium 8.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTCRXX358A4 $695.00

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Chromium 3.00" Dia x 0.125" Thick 99.95% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUCRXX353A4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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