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Calcium Titanate (CaTiO3) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Specifications

Material TypeCalcium Titanate
SymbolCaTiO3
Melting Point (°C)1,975
SputterRF
CommentsDisproportionates except in sputtering.

Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


SDS
Click here for the Calcium Titanate SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Calcium Titanate 1.00" Dia x 0.125" Thick 99.9% All Standard Guns EJTCATIO31A2 P.O.R.
Calcium Titanate 1.00" Dia x 0.250" Thick 99.9% All Standard Guns EJTCATIO31A4 P.O.R.
Calcium Titanate 2.00" Dia x 0.125" Thick 99.9% All Standard Guns EJTCATIO32A2 P.O.R.
Calcium Titanate 2.00" Dia x 0.250" Thick 99.9% All Standard Guns EJTCATIO32A4 P.O.R.

 

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