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Copper (Cu) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Specifications

Material TypeCopper
SymbolCu
Atomic Weight63.546
Atomic Number29
Color/AppearanceCopper, Metallic
Thermal Conductivity400 W/m.K
Melting Point (°C)1,083
Coefficient of Thermal Expansion16.5 x 10-6/K
Theoretical Density (g/cc)8.92
Z Ratio0.437
SputterDC
Max Power Density*
(Watts/Square Inch)
200
Type of BondIndium, Elastomer
CommentsAdhesion poor. Use interlayer (Cr). Evaporates using any source material.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


SDS
Click here for the Copper SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Copper 1.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTCUXX401A2 $65.00
Copper 1.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX501A2 $70.00
Copper 1.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX401A4 $90.00
Copper 1.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX501A4 $105.00
Copper 2.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTCUXX402A2 $85.00
Copper 2.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX502A2 $140.00
Copper 2.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX402A4 $95.00
Copper 2.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX502A4 $175.00
Copper 2.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTCUXX402K4 P.O.R.
Copper 2.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 2 EJTCUXX402TK4 P.O.R.
Copper 2.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 2 EJTCUXX502TK4 P.O.R.
Copper 3.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTCUXX403A2 $95.00
Copper 3.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX503A2 $185.00
Copper 3.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX403A4 $115.00
Copper 3.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX503A4 $250.00
Copper 3.00" Dia. x 0.250" Thick 99.99% U.S. Gun EJTCUXX403K4 P.O.R.
Copper 3.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 3 EJTCUXX403TK4 P.O.R.
Copper 4.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTCUXX404A2 $125.00
Copper 4.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX504A2 P.O.R.
Copper 4.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX404A4 $130.00
Copper 4.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX504A4 $400.00
Copper 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 EJTCUXX404TK4 P.O.R.
Copper 4.00" Dia. x 0.250" Thick 99.999% U.S. Gun EJTCUXX504K4 P.O.R.
Copper 4.00" Dia. x 0.250" Thick 99.999% TORUS Mag Keeper 4 EJTCUXX504TK4 P.O.R.
Copper 5.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX405A4 P.O.R.
Copper 6.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTCUXX406A2 P.O.R.
Copper 6.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX506A2 P.O.R.
Copper 6.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX406A4 $298.00
Copper 6.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX506A4 $715.00
Copper 8.0" Dia. x 0.125" Thick 99.999% All Standard Guns EJTCUXX508A2 P.O.R.
Copper 8.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTCUXX408A4 $315.00
Copper 8.0" Dia. x 0.250" Thick 99.999% All Standard Guns EJTCUXX508A4 P.O.R.

 

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