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Iron (Fe) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Iron is the most commonly used metal in the world. It is metallic-gray in color, ductile, ferromagnetic, and rusts easily when exposed to oxygen. It has a melting point of 1,535°C, a density of 7.86 g/cc, and a vapor pressure of 10-4 Torr at 1,180°C. Iron is found in a vast array of products including tools, automobiles, and machinery. When alloyed with carbon, steel is created which is an essential component for building construction and automobile manufacturing. Iron also has biological importance as it is responsible for carrying oxygen in blood. It is evaporated under vacuum to form layers in the production of semiconductors, magnetic storage media, and fuel cells, just to name a few.


Specifications

Material TypeIron †
SymbolFe
Atomic Weight55.845
Atomic Number26
Color/AppearanceLustrous, Metallic, Grayish Tinge
Thermal Conductivity80 W/m.K
Melting Point (°C)1,535
Coefficient of Thermal Expansion11.8 x 10-6/K
Theoretical Density (g/cc)7.86
FerromagneticMagnetic Material
Z Ratio0.349
SputterDC
Max Power Density*
(Watts/Square Inch)
50
CommentsAttacks W. Films hard, smooth. Preheat gently to outgas.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

NOTE:

  • Ferromagnetic materials require additional consideration when selecting configuration/ thickness. High strength magnets or thinner targets may be required. Bonding these materials creates additional concerns due to the increase in distance from the magnets. Contact your magnetron sputter cathode supplier or reference your equipment manual for additional information.
  • Some materials and manufacturing methods may yield product with surface imperfections. In many cases, these imperfections are merely visual defects. Performance may be affected according to process requirements.

SDS
Click here for the Iron SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Iron 1.0" Dia. x 0.0625" Thick 99.99% All Standard Guns EJTFEXX401A1 P.O.R.
Iron 1.0" Dia. x 0.063" Thick 99.9% All Standard Guns EJTFEXX301A1 $83.00
Iron 1.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTFEXX301A2 $90.00
Iron 1.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTFEXX351A2 $98.00
Iron 1.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTFEXX401A2 P.O.R.
Iron 1.0" Dia. x 0.250" Thick 99.95% All Standard Guns EJTFEXX351A4 P.O.R.
Iron 1.5" Dia. x 0.063" Thick 99.99% All Standard Guns EJTFE401.5A1 P.O.R.
Iron 2.0" Dia. X 0.055" Thick 99.99% TORUS Mag Keeper 2 EJTFEXX402TK P.O.R.
Iron 2.0" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTFEXX352A1 $96.00
Iron 2.0" Dia. x 0.0625" Thick 99.99% All Standard Guns EJTFEXX402A1 P.O.R.
Iron 2.0" Dia. x 0.063" Thick 99.9% All Standard Guns EJTFEXX302A1 $83.00
Iron 2.0" Dia. x 0.08" Thick 99.95% All Standard Guns EJTFE352A.08 P.O.R.
Iron 2.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTFEXX302A2 $101.00
Iron 2.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTFEXX352A2 $121.00
Iron 2.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTFEXX402A2 P.O.R.
Iron 2.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTFEXX302A4 P.O.R.
Iron 2.0" Dia. x 0.250" Thick 99.95% All Standard Guns EJTFEXX352A4 P.O.R.
Iron 2.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTFEXX402A4 P.O.R.
Iron 3.0" Dia. X 0.100" Thick 99.99% TORUS Mag Keeper 3 EJTFEXX403TK P.O.R.
Iron 3.0" Dia. x 0.04" Thick 99.95% All Standard Guns EJTFEXXSPL37 P.O.R.
Iron 3.0" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTFEXX353A1 $163.00
Iron 3.0" Dia. x 0.063" Thick 99.9% All Standard Guns EJTFEXX303A1 $116.00
Iron 3.0" Dia. x 0.08" Thick 99.95% All Standard Guns EJTFE353A.08 P.O.R.
Iron 3.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTFEXX303A2 $96.00
Iron 3.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTFEXX353A2 $133.00
Iron 3.0" Dia. x 0.125" Thick 99.99% All Standard Guns EJTFEXX403A2 P.O.R.
Iron 3.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTFEXX303A4 P.O.R.
Iron 3.0" Dia. x 0.250" Thick 99.99% All Standard Guns EJTFEXX403A4 P.O.R.
Iron 4.0" Dia. X 0.100" Thick 99.99% TORUS Mag Keeper 4 EJTFEXX404TK P.O.R.
Iron 4.0" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTFEXX354A1 P.O.R.
Iron 4.0" Dia. x 0.08" Thick 99.99% All Standard Guns EJTFE404A.08 P.O.R.
Iron 4.0" Dia. x 0.09" Thick 99.9% All Standard Guns EJTFEXX304A.09 P.O.R.
Iron 4.0" Dia. x 0.100" Thick 99.9% All Standard Guns EJTFEXX304A+ P.O.R.
Iron 4.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTFEXX304A2 $138.00
Iron 4.0" Dia. x 0.125" Thick 99.95% All Standard Guns EJTFEXX354A2 $156.00
Iron 4.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTFEXX304A4 P.O.R.

 

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