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Palladium (Pd) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Palladium is a silvery-white precious metal that bears a sharp resemblance to platinum. It has a melting point of 1,554°C, a density of 12.038 g/cc, and a vapor pressure of 10-4 Torr at 1,192°C. It belongs to the platinum group of metals on the periodic table. It has the lowest melting point of the elements of this group and is the least dense. Palladium is remarkably malleable, ductile, and corrosion resistant. Like platinum, its most prominent use in industry is as a catalytic converter. It can also found in jewelry and surgical instruments. Palladium is evaporated under vacuum for the manufacture of semiconductors, sensors, and data storage.


Specifications

Material TypePalladium
SymbolPd
Atomic Weight106.42
Atomic Number46
Color/AppearanceSilvery White Metallic
Thermal Conductivity72 W/m.K
Melting Point (°C)1,554
Coefficient of Thermal Expansion11.8 x 10-6/K
Theoretical Density (g/cc)12.02
Z Ratio0.357
SputterDC
Max Power Density*
(Watts/Square Inch)
100
Type of BondIndium, Elastomer
CommentsAlloys with refractory metals.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

Precious Metals Recycling Program We offer a precious metals recycling program designed to reduce your material costs. Click here for details.

Volume Pricing Available Volume pricing is available upon request. Please contact international@lesker.com with your required quantity.

SDS
Click here for the Palladium SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Palladium 1.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX351A2 P.O.R.
Palladium 1.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX351A4 P.O.R.
Palladium 2.00" Dia. x 0.0625" Thick 99.95% All Standard Guns EJTPDXX352A1 P.O.R.
Palladium 2.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX352A2 $3,713.00
Palladium 2.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX352A4 P.O.R.
Palladium 3.00" Dia. x 0.0625" Thick 99.99% All Standard Guns EJTPDXX353A1 P.O.R.
Palladium 3.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX353A2 $5,917.00
Palladium 3.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX353A4 P.O.R.
Palladium 4.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX354A2 P.O.R.
Palladium 4.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX354A4 P.O.R.
Palladium 6.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX356A2 P.O.R.
Palladium 6.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX356A4 P.O.R.
Palladium 8.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTPDXX358A2 P.O.R.
Palladium 8.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTPDXX358A4 P.O.R.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Palladium 1.00" Dia x 0.125" Thick 99.95% Indium 1.00" Dia x 0.125" Thick All Standard Guns EJUPDXX351A4 P.O.R.
Palladium 2.00" Dia x 0.125" Thick 99.95% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUPDXX352A4 P.O.R.
Palladium 4.00" Dia x 0.125" Thick 99.95% Indium 4.00" Dia x 0.125" Thick All Standard Guns EJUPDXX354A4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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