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Platinum (Pt) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Platinum is one of nine precious metals on the periodic table. It has a melting point of 1,772°C, a density of 21.4 g/cc, and vapor pressure of 10-4 Torr at 1,747°C. It is a radiant, silvery-white metal that bears a striking resemblance to palladium. It is dense, malleable, ductile, and corrosion resistant in air. Its most prominent commercial application is as a catalytic converter in vehicles. Platinum is evaporated under vacuum for the manufacture of semiconductors, fuel cells, and batteries. It is also utilized as a layer for optical coatings. Platinum is commonly found in jewelry and laboratory instruments.


Specifications

Material TypePlatinum
SymbolPt
Atomic Weight195.084
Atomic Number78
Color/AppearanceMetallic Gray
Thermal Conductivity72 W/m.K
Melting Point (°C)1,772
Coefficient of Thermal Expansion8.8 x 10-6/K
Theoretical Density (g/cc)21.45
Z Ratio0.245
SputterDC
Max Power Density*
(Watts/Square Inch)
100
Type of BondIndium, Elastomer
CommentsAlloys with metals. Films soft, poor adhesion. Temperatures required to achieve deposition may not be practical for thermal evaporation.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

Precious Metals Recycling Program We offer a precious metals recycling program designed to reduce your material costs. Click here for details.

Volume Pricing Available Volume pricing is available upon request. Please contact international@lesker.com with your required quantity.

SDS
Click here for the Platinum SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Platinum 1.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTPTXX401A1 P.O.R.
Platinum 1.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX401A2 P.O.R.
Platinum 1.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX401A4 P.O.R.
Platinum 2.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTPTXX402A1 $3,550.00
Platinum 2.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX402A2 $6,213.00
Platinum 2.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX402A4 P.O.R.
Platinum 3.00" Dia. x 0.063" Thick 99.99% All Standard Guns EJTPTXX403A1 P.O.R.
Platinum 3.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX403A2 P.O.R.
Platinum 3.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX403A4 P.O.R.
Platinum 4.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX404A2 P.O.R.
Platinum 4.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX404A4 P.O.R.
Platinum 6.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX406A2 P.O.R.
Platinum 6.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX406A4 P.O.R.
Platinum 8.00" Dia. x 0.125" Thick 99.99% All Standard Guns EJTPTXX408A2 P.O.R.
Platinum 8.00" Dia. x 0.250" Thick 99.99% All Standard Guns EJTPTXX408A4 P.O.R.

 

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