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Ruthenium (Ru) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Specifications

Material TypeRuthenium
SymbolRu
Atomic Weight101.07
Atomic Number44
Color/AppearanceSilvery White Metallic
Thermal Conductivity120 W/m.K
Melting Point (°C)2,310
Coefficient of Thermal Expansion6.4 x 10-6/K
Theoretical Density (g/cc)12.3
Z Ratio0.182
SputterDC
Max Power Density*
(Watts/Square Inch)
100
Type of BondIndium, Elastomer

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

NOTE:

  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Ruthenium SDS.
Precious Metals
Reclaim Service
We offer a precious metal reclaim program, designed to reduce replacement costs.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Ruthenium 1.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTRUXX351A2 P.O.R.
Ruthenium 1.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTRUXX351A4 P.O.R.
Ruthenium 2.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTRUXX352A2 P.O.R.
Ruthenium 2.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTRUXX352A4 P.O.R.
Ruthenium 3.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTRUXX353A2 P.O.R.
Ruthenium 3.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTRUXX353A4 P.O.R.
Ruthenium 4.00" Dia. x 0.125" Thick 99.95% All Standard Guns EJTRUXX354A2 P.O.R.
Ruthenium 4.00" Dia. x 0.250" Thick 99.95% All Standard Guns EJTRUXX354A4 P.O.R.

 

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