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Silicon (Si (N-type)) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


Specifications

Material TypeSilicon (N-type)
SymbolSi (N-type)
Atomic Weight28.0855
Atomic Number14
Color/AppearanceDark Gray with a Bluish Tinge, Semi-Metallic
Thermal Conductivity150 W/m.K
Melting Point (°C)1,410
Bulk Resistivity<0.1 OHM-CM
Coefficient of Thermal Expansion2.6 x 10-6/K
Theoretical Density (g/cc)2.32
DopantPhosphorous, Arsenic, or Antimony
Z Ratio0.712
SputterDC, RF
Max Power Density*
(Watts/Square Inch)
40
Type of BondIndium, Elastomer

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


Material Notes

NOTE:

  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Silicon SDS.
Product Datasheet
Click for a downloadable datasheet on the Silicon Si (N-type) Sputtering Targets.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Silicon 1.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX501A2 $376.00
Silicon 1.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX501A4 $200.00
Silicon 2.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX502A2 $195.00
Silicon 2.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX502A4 $280.00
Silicon 3.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX503A2 $370.00
Silicon 3.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX503A4 $375.00
Silicon 4.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX504A2 $375.00
Silicon 4.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX504A4 $380.00
Silicon 4.75" x 14.875" x 0.250" 99.999% All Standard Guns EJTNSIXMRCA4 P.O.R.
Silicon 5.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX505A2 $380.00
Silicon 5.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX505A4 P.O.R.
Silicon 6.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX506A2 P.O.R.
Silicon 6.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX506A4 P.O.R.
Silicon 8.00" Dia. x 0.125" Thick 99.999% All Standard Guns EJTNSIX508A2 P.O.R.
Silicon 8.00" Dia. x 0.250" Thick 99.999% All Standard Guns EJTNSIX508A4 P.O.R.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Silicon 1.00" Dia x 0.125" Thick 99.999% Indium 1.00" Dia x 0.125" Thick All Standard Guns EJUNSIX501A4 P.O.R.
Silicon 2.00" Dia x 0.125" Thick 99.999% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUNSIX502A4 P.O.R.
Silicon 3.00" Dia x 0.125" Thick 99.999% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUNSIX503A4 P.O.R.
Silicon 4.00" Dia x 0.125" Thick 99.999% Indium 4.00" Dia x 0.125" Thick All Standard Guns EJUNSIX504A4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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