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Titanium (Ti) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.


General

Titanium is a common material found in a myriad of products including watches, drill bits, laptops, and bicycles, just to name a few. In pure form, it is lustrous and silvery-white in appearance. It has a melting point of 1,660°C, a density of 4.5 g/cc, and a vapor pressure of 10-4 Torr at 1,453°C. It is a sturdy material which is easily fabricated when heat is applied. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is biocompatible so it can be found in surgical tools and implants. Titanium is generally evaporated in vacuum for the purposes of wear and decorative, semiconductor, and optical coatings.


Specifications

Material TypeTitanium
SymbolTi
Atomic Weight47.867
Atomic Number22
Color/AppearanceSilvery Metallic
Thermal Conductivity21.9 W/m.K
Melting Point (°C)1,660
Coefficient of Thermal Expansion8.6 x 10-6/K
Theoretical Density (g/cc)4.5
Z Ratio0.628
SputterDC
Max Power Density*
(Watts/Square Inch)
50
Type of BondIndium, Elastomer
CommentsAlloys with W/Ta/Mo; evolves gas on first heating.

* This is a recommendation based on our experience running these materials in KJLC guns. The ratings are based on unbonded targets and are material specific. Bonded targets should be run at lower powers to prevent bonding failures. Bonded targets should be run at 20 Watts/Square Inch or lower, depending on the material.


Z-Factors

Empirical Determination of Z-Factor

Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:

  • Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
  • Place a new substrate adjacent to the used quartz sensor.
  • Set QCM Density to the calibrated value; Tooling to 100%
  • Zero thickness
  • Deposit approximately 1000 to 5000 A of material on the substrate.
  • Use a profilometer or interferometer to measure the actual substrate film thickness.
  • Adjust the Z Factor of the instrument until the correct thickness reading is shown.

Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.


SDS
Click here for the Titanium SDS.
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Titanium 1.0" Dia. x 0.125" Thick 99.2%-99.7% All Standard Guns EJTTIXX271A2 $65.00
Titanium 1.0" Dia. x 0.125" Thick 99.97%-99.98% All Standard Guns EJTTIXX371A2 $85.00
Titanium 1.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX451A2 $85.00
Titanium 1.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX271A4 $75.00
Titanium 1.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX371A4 $93.00
Titanium 1.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX451A4 $90.00
Titanium 2.0" Dia. x 0.125" Thick 99.2%-99.7% All Standard Guns EJTTIXX272A2 $75.00
Titanium 2.0" Dia. x 0.125" Thick 99.97%-99.98% All Standard Guns EJTTIXX372A2 $95.00
Titanium 2.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX452A2 $103.00
Titanium 2.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX272A4 $80.00
Titanium 2.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX372A4 $120.00
Titanium 2.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX452A4 $120.00
Titanium 2.00" Dia. x 0.250" Thick 99.2%-99.7% U.S. Gun EJTTIXX272K4 P.O.R.
Titanium 2.00" Dia. x 0.250" Thick 99.97% U.S. Gun EJTTIXX372K4 P.O.R.
Titanium 2.00" Dia. x 0.250" Thick 99.995% U.S. Gun EJTTIXX452K4 P.O.R.
Titanium 2.00" Dia. x 0.250" Thick 99.995% TORUS Mag Keeper 2 EJTTIXX452TK4 P.O.R.
Titanium 3.0" Dia. x 0.125" Thick 99.2%-99.7% All Standard Guns EJTTIXX273A2 $80.00
Titanium 3.0" Dia. x 0.125" Thick 99.97%-99.98% All Standard Guns EJTTIXX373A2 P.O.R.
Titanium 3.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX453A2 $145.00
Titanium 3.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX273A4 $85.00
Titanium 3.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX373A4 $150.00
Titanium 3.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX453A4 $160.00
Titanium 3.00" Dia. x 0.250" Thick 99.995% U.S. Gun EJTTIXX453K4 P.O.R.
Titanium 3.00" Dia. x 0.250" Thick 99.995% TORUS Mag Keeper 3 EJTTIXX453TK4 P.O.R.
Titanium 4.0" Dia. x 0.125" Thick 99.2%-99.7% All Standard Guns EJTTIXX274A2 $118.00
Titanium 4.0" Dia. x 0.125" Thick 99.97%-99.98% All Standard Guns EJTTIXX374A2 $140.00
Titanium 4.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX454A2 $250.00
Titanium 4.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX274A4 $205.00
Titanium 4.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX374A4 P.O.R.
Titanium 4.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX454A4 $260.00
Titanium 4.00" Dia. x 0.250" Thick 99.97% TORUS Mag Keeper 4 EJTTIXX374TK4 P.O.R.
Titanium 4.00" Dia. x 0.250" Thick 99.99% TORUS Mag Keeper 4 EJTTIXX404TK4 P.O.R.
Titanium 5.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX455A4 P.O.R.
Titanium 6.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX456A2 P.O.R.
Titanium 6.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX276A4 P.O.R.
Titanium 6.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX376A4 P.O.R.
Titanium 6.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX456A4 P.O.R.
Titanium 8.0" Dia. x 0.125" Thick 99.995% All Standard Guns EJTTIXX458A2 P.O.R.
Titanium 8.0" Dia. x 0.250" Thick 99.2%-99.7% All Standard Guns EJTTIXX278A4 P.O.R.
Titanium 8.0" Dia. x 0.250" Thick 99.97%-99.98% All Standard Guns EJTTIXX378A4 P.O.R.
Titanium 8.0" Dia. x 0.250" Thick 99.995% All Standard Guns EJTTIXX458A4 P.O.R.

 

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