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Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) Sputtering Targets

Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. Contact international@lesker.com for current pricing or for a quote on sputtering targets and other deposition products not listed.



Material Notes

NOTE:

  • Partially Stabilized ZrO2 available upon request.
  • Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

Export Controlled

NOTE:

  • This is an Export Controlled Material. Restrictions may apply.

SDS
Click here for the Zirconium Oxide SDS.
Product Datasheet
Request A Quote
Can't find the size or material you need? Please use our Materials Quotation Form to request.
Deposition Materials FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call 1-412-387-9200 or email international@lesker.com.

Ordering Table

Material Size Purity Compatible Guns Part # Price Add To
Cart
Material Size Purity Compatible Guns Part # Price Add To
Cart
Zirconium Oxide 1.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX301A2 $545.00
Zirconium Oxide 1.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX301A4 $610.00
Zirconium Oxide 2.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX302A2 $735.00
Zirconium Oxide 2.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX302A4 $845.00
Zirconium Oxide 3.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX303A2 $875.00
Zirconium Oxide 3.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX303A4 $1,030.00
Zirconium Oxide 4.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX304A2 $1,210.00
Zirconium Oxide 4.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX304A4 $1,515.00
Zirconium Oxide 5.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX305A2 P.O.R.
Zirconium Oxide 6.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX306A2 P.O.R.
Zirconium Oxide 6.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX306A4 P.O.R.
Zirconium Oxide 8.0" Dia. x 0.125" Thick 99.9% All Standard Guns EJTZROX308A2 P.O.R.
Zirconium Oxide 8.0" Dia. x 0.250" Thick 99.9% All Standard Guns EJTZROX308A4 P.O.R.

Bonded Assemblies Ordering Table

Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Material Target
Size
Purity Bonding Type Backing Plate
Size
Compatible Guns PartNo Price Add To
Cart
Zirconium Oxide 1.00" Dia x 0.125" Thick 99.9% Indium 1.00" Dia x 0.125" Thick All Standard Guns EJUZROX301A4 P.O.R.
Zirconium Oxide 2.00" Dia x 0.125" Thick 99.9% Indium 2.00" Dia x 0.125" Thick All Standard Guns EJUZROX302A4 P.O.R.
Zirconium Oxide 2.00" Dia x 0.125" Thick 99.9% Indium 2.00" Dia x 0.092" Thick Standard TORUS 2 EJUZROX302T4 P.O.R.
Zirconium Oxide 3.00" Dia x 0.125" Thick 99.9% Indium 3.00" Dia x 0.125" Thick All Standard Guns EJUZROX303A4 P.O.R.

Notes: Bonded assemblies to be used in TORUS Mag Keeper guns require Elastomer bonding

 

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