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Deposition Materials

Backing Plates for OEM Sources

For use with popular sputtering systems from OEMs, including Perkin-Elmer, MRC, and CVC

• We stock all backing plates listed below; call for availability for other sputtering system models not shown
• Models listed meet or exceed the quality and reliability of the original parts

NOTE:Please contact our Materials Department at materials@lesker.com or fax us at 412-384-2573 for pricing and availability.

Ordering Table

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Sputter Source OEM	Compatible Model(s)	Description	PartNo
Perkin-Elmer	2400/4400	Standard Copper Backing Plate for RF Magnetron	EJBPA1921001
Perkin-Elmer	2400/4400	Low-Carbon Iron & Copper Backing Plate for DC Magnetron	EJBPA1928101
MRC	600/900	Standard Copper Backing Plate with Removable Stainless Steel Studs	EJBPA341005
MRC	8600	Stainless Steel Backing Plate	EJBPA1923602
CVC	601	Enhanced Copper Backing Plate with Serpentine Water Cooling Track	EJBPCUCVC601

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